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Thomas Frederick A. Bibby
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Gilbert, AZ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Learning method and apparatus for predictive determination of endpo...
Patent number
6,676,482
Issue date
Jan 13, 2004
SpeedFam-IPEC Corporation
Thomas F. A. Bibby
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for in-situ endpoint detection using electrica...
Patent number
6,515,493
Issue date
Feb 4, 2003
SpeedFam-IPEC Corporation
John A. Adams
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for using optical reflection data to obtain a...
Patent number
6,491,569
Issue date
Dec 10, 2002
SpeedFam-IPEC Corporation
Thomas Frederick Allen Bibby
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for endpoint detection for chemical mechanical...
Patent number
6,361,646
Issue date
Mar 26, 2002
SpeedFam-IPEC Corporation
Thomas Frederick Allen Bibby
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for endpoint detection for chemical mechanical...
Patent number
6,106,662
Issue date
Aug 22, 2000
SpeedFam-IPEC Corporation
Thomas Frederick Allen Bibby
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor wafer polishing apparatus with a variable polishing f...
Patent number
6,056,632
Issue date
May 2, 2000
SpeedFam-IPEC Corp.
Fred E. Mitchel
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Spectral imaging of substrates
Publication number
20060166608
Publication date
Jul 27, 2006
Scott A. Chalmers
B24 - GRINDING POLISHING
Information
Patent Application
Whole-substrate spectral imaging system for CMP
Publication number
20040259472
Publication date
Dec 23, 2004
Scott A. Chalmers
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for optical multi-angle endpoint detection dur...
Publication number
20020191197
Publication date
Dec 19, 2002
Thomas F.A. Bibby
G01 - MEASURING TESTING
Information
Patent Application
Learning method and apparatus for predictive determination of endpo...
Publication number
20020155789
Publication date
Oct 24, 2002
Thomas F.A. Bibby
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR USING OPTICAL REFLECTION DATA TO OBTAIN A...
Publication number
20020155788
Publication date
Oct 24, 2002
Thomas Frederick Allen Bibby
B24 - GRINDING POLISHING