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Thomas Frederick
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West Linn, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
RF current measurement in semiconductor processing tool
Patent number
12,051,630
Issue date
Jul 30, 2024
Lam Research Corporation
Sunil Kapoor
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Impedance transformation in radio-frequency-assisted plasma generation
Patent number
11,984,298
Issue date
May 14, 2024
Lam Research Corporation
Eller Y. Juco
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capacitance measurement without disconnecting from high power circuit
Patent number
11,881,381
Issue date
Jan 23, 2024
Lam Research Corporation
Sunil Kapoor
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
RF generator for generating a modulated frequency or an inter-modul...
Patent number
10,665,427
Issue date
May 26, 2020
Lam Research Corporation
Sunil Kapoor
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF generator for generating a modulated frequency or an inter-modul...
Patent number
10,304,663
Issue date
May 28, 2019
Lam Research Corporation
Sunil Kapoor
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
IMPEDANCE TRANSFORMATION IN RADIO-FREQUENCY-ASSISTED PLASMA GENERATION
Publication number
20240258073
Publication date
Aug 1, 2024
LAM RESEARCH CORPORATION
Eller Y. Juco
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITANCE MEASUREMENT WITHOUT DISCONNECTING FROM HIGH POWER CIRCUIT
Publication number
20240096598
Publication date
Mar 21, 2024
LAM RESEARCH CORPORATION
Sunil Kapoor
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPEDANCE TRANSFORMATION IN RADIO-FREQUENCY-ASSISTED PLASMA GENERATION
Publication number
20220415616
Publication date
Dec 29, 2022
LAM RESEARCH CORPORATION
Eller Y. Juco
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITANCE MEASUREMENT WITHOUT DISCONNECTING FROM HIGH POWER CIRCUIT
Publication number
20210098233
Publication date
Apr 1, 2021
LAM RESEARCH CORPORATION
Sunil Kapoor
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RF CURRENT MEASUREMENT IN SEMICONDUCTOR PROCESSING TOOL
Publication number
20210090962
Publication date
Mar 25, 2021
LAM RESEARCH CORPORATION
Sunil Kapoor
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RF GENERATOR FOR GENERATING A MODULATED FREQUENCY OR AN INTER-MODUL...
Publication number
20200027701
Publication date
Jan 23, 2020
LAM RESEARCH CORPORATION
Sunil Kapoor
H01 - BASIC ELECTRIC ELEMENTS