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Thomas Grabolla
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Arensdorf, DE
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last 30 patents
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Patent Grant
Apparatus for low-temperature epitaxy on a plurality semiconductor...
Patent number
8,932,405
Issue date
Jan 13, 2015
IHP GmbH—Innovations for High Performance Microelectronics/Institut fur Innov...
Thomas Grabolla
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and device for the production of thin epitaxial semiconducto...
Patent number
7,244,667
Issue date
Jul 17, 2007
IHP GmbH - Innovations for High Performance Microelectronics
Bernd Tillack
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method of and Apparatus for Low-Temperature Epitaxy on a Plurality...
Publication number
20080050929
Publication date
Feb 28, 2008
Thomas Grabolla
C30 - CRYSTAL GROWTH
Information
Patent Application
Method and device for the production of thin epiatctic semiconducto...
Publication number
20040266142
Publication date
Dec 30, 2004
Bernd Tillack
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...