Thomas Graf

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Biberach, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for the removing of adsorbed molecules from a chamber
- Patent number 6,830,631
- Issue date Dec 14, 2004
- Steag RTP Systems GmbH
- Zsolt Nenyei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for the removing of adsorbed molecules from a chamber
- Publication number 20030155000
- Publication date Aug 21, 2003
- Zsolt Nenyei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...