Thomas H. Osterheld

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Training spectrum generation for machine learning system for spectr...
- Patent number 12,020,159
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Benjamin Cherian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Control of processing parameters for substrate polishing with angul...
- Patent number 11,931,853
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Eric Lau
- B24 - GRINDING POLISHING
Information Patent Grant
Consumable part monitoring in chemical mechanical polisher
- Patent number 11,931,860
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Thomas H. Osterheld
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Polishing system with annular platen or polishing pad
- Patent number 11,780,046
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Monitoring of polishing pad texture in chemical mechanical polishing
- Patent number 11,731,238
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Thomas H. Osterheld
- B24 - GRINDING POLISHING
Information Patent Grant
Monitoring of vibrations during chemical mechanical polishing
- Patent number 11,701,749
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Boguslaw A. Swedek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imaging for monitoring thickness in a substrate cleaning system
- Patent number 11,699,595
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Dominic J. Benvegnu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Training spectrum generation for machine learning system for spectr...
- Patent number 11,651,207
- Issue date May 16, 2023
- Applied Materials, Inc.
- Benjamin Cherian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Machine vision as input to a CMP process control algorithm
- Patent number 11,577,356
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Benjamin Cherian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Consumable part monitoring in chemical mechanical polisher
- Patent number 11,571,786
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Thomas H. Osterheld
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Polishing system with support post and annular platen or polishing pad
- Patent number 11,511,388
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Training spectrum generation for machine learning system for spectr...
- Patent number 11,507,824
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Benjamin Cherian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Chemical mechanical polishing apparatus and methods
- Patent number 11,453,097
- Issue date Sep 27, 2022
- Applied Materials, Inc.
- Rajeev Bajaj
- B24 - GRINDING POLISHING
Information Patent Grant
Textured small pad for chemical mechanical polishing
- Patent number 10,589,399
- Issue date Mar 17, 2020
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with annular platen or polishing pad for substrate...
- Patent number 10,562,147
- Issue date Feb 18, 2020
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing apparatus and methods
- Patent number 10,500,694
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Rajeev Bajaj
- B24 - GRINDING POLISHING
Information Patent Grant
Acoustic emission monitoring and endpoint for chemical mechanical p...
- Patent number 10,478,937
- Issue date Nov 19, 2019
- Applied Materials, Inc.
- Jianshe Tang
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing automated recipe generation
- Patent number 10,256,111
- Issue date Apr 9, 2019
- Applied Materials, Inc.
- Eric Lau
- G01 - MEASURING TESTING
Information Patent Grant
Dynamic residue clearing control with in-situ profile control (ISPC)
- Patent number 9,242,337
- Issue date Jan 26, 2016
- Applied Materials, Inc.
- Jun Qian
- B24 - GRINDING POLISHING
Information Patent Grant
Multi-platen multi-head polishing architecture
- Patent number 9,227,293
- Issue date Jan 5, 2016
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Grant
Endpointing with selective spectral monitoring
- Patent number 9,221,147
- Issue date Dec 29, 2015
- Applied Materials, Inc.
- Jun Qian
- B24 - GRINDING POLISHING
Information Patent Grant
Thin polishing pad with window and molding process
- Patent number 9,138,858
- Issue date Sep 22, 2015
- Applied Materials, Inc.
- Dominic J. Benvegnu
- B24 - GRINDING POLISHING
Information Patent Grant
Path for probe of spectrographic metrology system
- Patent number 9,056,383
- Issue date Jun 16, 2015
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring monitoring and control of pressure
- Patent number 9,017,138
- Issue date Apr 28, 2015
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Temperature control of chemical mechanical polishing
- Patent number 9,005,999
- Issue date Apr 14, 2015
- Applied Materials, Inc.
- Kun Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Weighted regression of thickness maps from spectral data
- Patent number 8,992,286
- Issue date Mar 31, 2015
- Applied Materials, Inc.
- Benjamin Cherian
- B24 - GRINDING POLISHING
Information Patent Grant
Selecting reference libraries for monitoring of multiple zones on a...
- Patent number 8,954,186
- Issue date Feb 10, 2015
- Applied Materials, Inc.
- Jun Qian
- G05 - CONTROLLING REGULATING
Information Patent Grant
Retaining ring for chemical mechanical polishing
- Patent number 8,771,460
- Issue date Jul 8, 2014
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Thin polishing pad with window and molding process
- Patent number 8,562,389
- Issue date Oct 22, 2013
- Applied Materials, Inc.
- Dominic J. Benvegnu
- B24 - GRINDING POLISHING
Information Patent Grant
Method of assembly of retaining ring for CMP
- Patent number 8,486,220
- Issue date Jul 16, 2013
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING SUBSTRATE POLISH EDGE UNIFORMITY
- Publication number 20240253183
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Priscilla Michelle Diep LAROSA
- B24 - GRINDING POLISHING
Information Patent Application
CARRIER HEAD ACOUSTIC MONITORING WITH SENSOR IN PLATEN
- Publication number 20240139905
- Publication date May 2, 2024
- Applied Materials, Inc.
- Benjamin Cherian
- B24 - GRINDING POLISHING
Information Patent Application
MONITORING THICKNESS IN FACE-UP POLISHING WITH ROLLER
- Publication number 20240017376
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Brian J. Brown
- B24 - GRINDING POLISHING
Information Patent Application
MONITORING THICKNESS IN FACE-UP POLISHING
- Publication number 20240017371
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Brian J. Brown
- B24 - GRINDING POLISHING
Information Patent Application
DETERMINING SUBSTRATE ORIENTATION WITH ACOUSTIC SIGNALS
- Publication number 20230390884
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Nicholas A. Wiswell
- B24 - GRINDING POLISHING
Information Patent Application
MONITORING OF ACOUSTIC EVENTS ON A SUBSTRATE
- Publication number 20230390886
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Upendra Ummethala
- B24 - GRINDING POLISHING
Information Patent Application
ACOUSTIC MONITORING OF CONDITIONER DURING POLISHING
- Publication number 20230390891
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Thomas H. Osterheld
- B24 - GRINDING POLISHING
Information Patent Application
ACOUSTIC MONITORING OF CMP RETAINING RING
- Publication number 20230390883
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Haoquan Fang
- B24 - GRINDING POLISHING
Information Patent Application
DETERMINING SUBSTRATE PRECESSION WITH ACOUSTIC SIGNALS
- Publication number 20230390885
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Nicholas A. Wiswell
- B24 - GRINDING POLISHING
Information Patent Application
MONITORING OF POLISHING PAD TEXTURE IN CHEMICAL MECHANICAL POLISHING
- Publication number 20230321788
- Publication date Oct 12, 2023
- Applied Materials, Inc.
- Thomas H. Osterheld
- B24 - GRINDING POLISHING
Information Patent Application
Training Spectrum Generation for Machine Learning System for Spectr...
- Publication number 20230267329
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Benjamin Cherian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONSUMABLE PART MONITORING IN CHEMICAL MECHANICAL POLISHER
- Publication number 20230249315
- Publication date Aug 10, 2023
- Applied Materials, Inc.
- Thomas H. Osterheld
- B24 - GRINDING POLISHING
Information Patent Application
MACHINE VISION AS INPUT TO A CMP PROCESS CONTROL ALGORITHM
- Publication number 20230182258
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Benjamin Cherian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHEMICAL MECHANICAL POLISHING VIBRATION MEASUREMENT USING OPTICAL S...
- Publication number 20230010759
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
ACOUSTIC WINDOW IN PAD BACKING LAYER FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20230009737
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Nicholas A. Wiswell
- B24 - GRINDING POLISHING
Information Patent Application
DETECTION OF PLANARIZATION FROM ACOUSTIC SIGNAL DURING CHEMICAL MEC...
- Publication number 20230010025
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Thomas H. Osterheld
- B24 - GRINDING POLISHING
Information Patent Application
COUPLING OF ACOUSTIC SENSOR FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20230009048
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Nicholas A. Wiswell
- B24 - GRINDING POLISHING
Information Patent Application
ACOUSTIC WINDOW WITH LIQUID-FILLED PORES FOR CHEMICAL MECHANICAL PO...
- Publication number 20230011626
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Nicholas A. Wiswell
- B24 - GRINDING POLISHING
Information Patent Application
ACOUSTIC WINDOW IN PAD POLISHING AND BACKING LAYER FOR CHEMICAL MEC...
- Publication number 20230009519
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Nicholas A. Wiswell
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING SYSTEM WITH ANNULAR PLATEN OR POLISHING PAD
- Publication number 20220410335
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Application
MONITOR CHEMICAL MECHANICAL POLISHING PROCESS USING MACHINE LEARNIN...
- Publication number 20220347813
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Thomas H. Osterheld
- B24 - GRINDING POLISHING
Information Patent Application
PASSIVE ACOUSTIC MONITORING AND ACOUSTIC SENSORS FOR CHEMICAL MECHA...
- Publication number 20220281057
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Nicholas A. Wiswell
- B24 - GRINDING POLISHING
Information Patent Application
ACTIVE ACOUSTIC MONITORING FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20220281058
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Nicholas A. Wiswell
- B24 - GRINDING POLISHING
Information Patent Application
CONTROL OF PROCESSING PARAMETERS FOR SUBSTRATE POLISHING WITH SUBST...
- Publication number 20220283554
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Eric Lau
- B24 - GRINDING POLISHING
Information Patent Application
CONTROL OF PROCESSING PARAMETERS FOR SUBSTRATE POLISHING WITH ANGUL...
- Publication number 20220281053
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Eric Lau
- B24 - GRINDING POLISHING
Information Patent Application
IMAGING FOR MONITORING THICKNESS IN A SUBSTRATE CLEANING SYSTEM
- Publication number 20220270889
- Publication date Aug 25, 2022
- Applied Materials, Inc.
- Dominic J. Benvegnu
- B08 - CLEANING
Information Patent Application
MONITORING OF POLISHING PAD TEXTURE IN CHEMICAL MECHANICAL POLISHING
- Publication number 20200298368
- Publication date Sep 24, 2020
- Applied Materials, Inc.
- Thomas H. Osterheld
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POLISHING SYSTEM WITH SUPPORT POST AND ANNULAR PLATEN OR POLISHING PAD
- Publication number 20200114487
- Publication date Apr 16, 2020
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Application
MACHINE VISION AS INPUT TO A CMP PROCESS CONTROL ALGORITHM
- Publication number 20200094370
- Publication date Mar 26, 2020
- Applied Materials, Inc.
- Benjamin Cherian
- B24 - GRINDING POLISHING
Information Patent Application
Chemical Mechanical Polishing Apparatus and Methods
- Publication number 20200086452
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Rajeev Bajaj
- B24 - GRINDING POLISHING

Thomas H. Osterheld

Person

Patents Grantslast 30 patents

Training spectrum generation for machine learning system for spectr...

Control of processing parameters for substrate polishing with angul...

Consumable part monitoring in chemical mechanical polisher

Polishing system with annular platen or polishing pad

Monitoring of polishing pad texture in chemical mechanical polishing

Monitoring of vibrations during chemical mechanical polishing

Imaging for monitoring thickness in a substrate cleaning system

Training spectrum generation for machine learning system for spectr...

Machine vision as input to a CMP process control algorithm

Consumable part monitoring in chemical mechanical polisher

Polishing system with support post and annular platen or polishing pad

Training spectrum generation for machine learning system for spectr...

Chemical mechanical polishing apparatus and methods

Textured small pad for chemical mechanical polishing

Polishing system with annular platen or polishing pad for substrate...

Chemical mechanical polishing apparatus and methods

Acoustic emission monitoring and endpoint for chemical mechanical p...

Chemical mechanical polishing automated recipe generation

Dynamic residue clearing control with in-situ profile control (ISPC)

Multi-platen multi-head polishing architecture

Endpointing with selective spectral monitoring

Thin polishing pad with window and molding process

Path for probe of spectrographic metrology system

Retaining ring monitoring and control of pressure

Temperature control of chemical mechanical polishing

Weighted regression of thickness maps from spectral data

Selecting reference libraries for monitoring of multiple zones on a...

Retaining ring for chemical mechanical polishing

Thin polishing pad with window and molding process

Method of assembly of retaining ring for CMP

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR CONTROLLING SUBSTRATE POLISH EDGE UNIFORMITY

CARRIER HEAD ACOUSTIC MONITORING WITH SENSOR IN PLATEN

MONITORING THICKNESS IN FACE-UP POLISHING WITH ROLLER

MONITORING THICKNESS IN FACE-UP POLISHING

DETERMINING SUBSTRATE ORIENTATION WITH ACOUSTIC SIGNALS

MONITORING OF ACOUSTIC EVENTS ON A SUBSTRATE

ACOUSTIC MONITORING OF CONDITIONER DURING POLISHING

ACOUSTIC MONITORING OF CMP RETAINING RING

DETERMINING SUBSTRATE PRECESSION WITH ACOUSTIC SIGNALS

MONITORING OF POLISHING PAD TEXTURE IN CHEMICAL MECHANICAL POLISHING

Training Spectrum Generation for Machine Learning System for Spectr...

CONSUMABLE PART MONITORING IN CHEMICAL MECHANICAL POLISHER

MACHINE VISION AS INPUT TO A CMP PROCESS CONTROL ALGORITHM

CHEMICAL MECHANICAL POLISHING VIBRATION MEASUREMENT USING OPTICAL S...

ACOUSTIC WINDOW IN PAD BACKING LAYER FOR CHEMICAL MECHANICAL POLISHING

DETECTION OF PLANARIZATION FROM ACOUSTIC SIGNAL DURING CHEMICAL MEC...

COUPLING OF ACOUSTIC SENSOR FOR CHEMICAL MECHANICAL POLISHING

ACOUSTIC WINDOW WITH LIQUID-FILLED PORES FOR CHEMICAL MECHANICAL PO...

ACOUSTIC WINDOW IN PAD POLISHING AND BACKING LAYER FOR CHEMICAL MEC...

POLISHING SYSTEM WITH ANNULAR PLATEN OR POLISHING PAD

MONITOR CHEMICAL MECHANICAL POLISHING PROCESS USING MACHINE LEARNIN...

PASSIVE ACOUSTIC MONITORING AND ACOUSTIC SENSORS FOR CHEMICAL MECHA...

ACTIVE ACOUSTIC MONITORING FOR CHEMICAL MECHANICAL POLISHING

CONTROL OF PROCESSING PARAMETERS FOR SUBSTRATE POLISHING WITH SUBST...

CONTROL OF PROCESSING PARAMETERS FOR SUBSTRATE POLISHING WITH ANGUL...

IMAGING FOR MONITORING THICKNESS IN A SUBSTRATE CLEANING SYSTEM

MONITORING OF POLISHING PAD TEXTURE IN CHEMICAL MECHANICAL POLISHING

POLISHING SYSTEM WITH SUPPORT POST AND ANNULAR PLATEN OR POLISHING PAD

MACHINE VISION AS INPUT TO A CMP PROCESS CONTROL ALGORITHM

Chemical Mechanical Polishing Apparatus and Methods