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Thomas Haase
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Dresden, DE
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Patents Grants
last 30 patents
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Patent Grant
Method of producing a device with a movable portion
Patent number
7,396,740
Issue date
Jul 8, 2008
Frauhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
Thor Bakke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Method of producing a device with a movable portion
Publication number
20060166463
Publication date
Jul 27, 2006
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung, e.V.
Thor Bakke
B81 - MICRO-STRUCTURAL TECHNOLOGY