Thomas Haensel

Follow

Person

Naunhof, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate for the micro-lithography and process of manufacturing th...
- Patent number 7,279,252
- Issue date Oct 9, 2007
- Schott AG
- Lutz Aschke
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Substrate for the micro-lithography and process of manufacturing th...
- Publication number 20040166420
- Publication date Aug 26, 2004
- Lutz Aschke
- B82 - NANO-TECHNOLOGY