Thomas Hall Baum

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Group VI precursor compounds
- Patent number 12,173,014
- Issue date Dec 24, 2024
- Entegris, Inc.
- David M. Ermert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors and methods for preparing silicon-containing films
- Patent number 12,071,688
- Issue date Aug 27, 2024
- Entegris, Inc.
- SangJin Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming carbon rich silicon-containing films
- Patent number 12,037,681
- Issue date Jul 16, 2024
- Entegris, Inc.
- Sungsil Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition processes using ruthenium precursor and r...
- Patent number 11,987,878
- Issue date May 21, 2024
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for nucleation of conductive nitride films
- Patent number 11,965,239
- Issue date Apr 23, 2024
- Entegris, Inc.
- Gavin Richards
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxyhalide precursors
- Patent number 11,919,780
- Issue date Mar 5, 2024
- Entegris, Inc.
- David M. Ermert
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Group VI precursor compounds
- Patent number 11,807,653
- Issue date Nov 7, 2023
- Entegris, Inc.
- David M. Ermert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...
- Patent number 11,804,375
- Issue date Oct 31, 2023
- Entegris, Inc.
- Sangbum Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cobalt precursors
- Patent number 11,761,086
- Issue date Sep 19, 2023
- Entegris, Inc.
- Thomas H. Baum
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Methods for depositing tungsten or molybdenum films
- Patent number 11,761,081
- Issue date Sep 19, 2023
- Entegris, Inc.
- Robert Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for preparing organotin compounds
- Patent number 11,685,752
- Issue date Jun 27, 2023
- Entegris, Inc.
- David M. Ermert
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Method for etching or deposition
- Patent number 11,624,111
- Issue date Apr 11, 2023
- Entegris, Inc.
- Robert L. Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum...
- Patent number 11,560,625
- Issue date Jan 24, 2023
- Entegris, Inc.
- Robert Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Group VI precursor compounds
- Patent number 11,560,397
- Issue date Jan 24, 2023
- Entegris, Inc.
- David M. Ermert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon hydrazido precursor compounds
- Patent number 11,492,364
- Issue date Nov 8, 2022
- Entegris, Inc.
- Manish Khandelwal
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Vapor deposition precursor compounds and process of use
- Patent number 11,466,038
- Issue date Oct 11, 2022
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming carbon rich silicon-containing films
- Patent number 11,414,750
- Issue date Aug 16, 2022
- Entegris, Inc.
- Sungsil Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of silicon nitride
- Patent number 11,380,539
- Issue date Jul 5, 2022
- Entegris, Inc.
- Han Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition processes using ruthenium precursor and r...
- Patent number 11,371,138
- Issue date Jun 28, 2022
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for preparing organotin compounds
- Patent number 11,358,975
- Issue date Jun 14, 2022
- Entegris, Inc.
- David M. Ermert
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Group VI precursor compounds
- Patent number 11,352,383
- Issue date Jun 7, 2022
- Entegris, Inc.
- David M. Ermert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aminoiodosilanes and methods of synthesizing these aminoiodosilanes
- Patent number 11,312,739
- Issue date Apr 26, 2022
- Entegris, Inc.
- Thomas H. Baum
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Preparation of triiodosilanes
- Patent number 11,203,604
- Issue date Dec 21, 2021
- Entegris, Inc.
- David Kuiper
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
CVD Mo deposition by using MoOCl4
- Patent number 11,107,675
- Issue date Aug 31, 2021
- Entegris, Inc.
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cold sintering of solid precursors
- Patent number 11,035,038
- Issue date Jun 15, 2021
- Entegris, Inc.
- Thomas H. Baum
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Triiodosilylamine precursor compounds
- Patent number 10,988,490
- Issue date Apr 27, 2021
- Entegris, Inc.
- Manish Khandelwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...
- Patent number 10,872,770
- Issue date Dec 22, 2020
- Entegris, Inc.
- Sangbum Han
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Alloys of Co to reduce stress
- Patent number 10,793,947
- Issue date Oct 6, 2020
- Entegris, Inc.
- Philip S. H. Chen
- B32 - LAYERED PRODUCTS
Information Patent Grant
Aminoiodosilanes and methods of synthesizing these aminoiodosilanes
- Patent number 10,640,523
- Issue date May 5, 2020
- Entegris, Inc.
- Thomas H. Baum
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
High-purity tungsten hexacarbonyl for solid source delivery
- Patent number 10,526,697
- Issue date Jan 7, 2020
- Entegris, Inc.
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CARBON-FREE LAMINATED HAFNIUM OXIDE/ZIRCONIUM OXIDE FILMS FOR FERRO...
- Publication number 20240395895
- Publication date Nov 28, 2024
- Entegris, Inc.
- Jun-Fei Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PREPARING IODOSILANES AND COMPOSITIONS THEREFROM
- Publication number 20240343591
- Publication date Oct 17, 2024
- Entegris, Inc.
- Scott A. Laneman
- C01 - INORGANIC CHEMISTRY
Information Patent Application
OXHALIDE PRECURSORS
- Publication number 20240140819
- Publication date May 2, 2024
- Entegris, Inc.
- David M. ERMERT
- C01 - INORGANIC CHEMISTRY
Information Patent Application
HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...
- Publication number 20240096631
- Publication date Mar 21, 2024
- Entegris, Inc.
- Sangbum Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUP VI PRECURSOR COMPOUNDS
- Publication number 20240034745
- Publication date Feb 1, 2024
- Entegris, Inc.
- David M. ERMERT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING TUNGSTEN OR MOLYBDENUM FILMS
- Publication number 20240035157
- Publication date Feb 1, 2024
- Entegris, Inc.
- Robert WRIGHT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR PREPARING ORGANOTIN COMPOUNDS
- Publication number 20230303596
- Publication date Sep 28, 2023
- Entegris, Inc.
- David M. ERMERT
- C07 - ORGANIC CHEMISTRY
Information Patent Application
VAPOR DEPOSITION OF MOLYBDENUM USING A BIS(ALKYL-ARENE) MOLYBDENUM...
- Publication number 20230128330
- Publication date Apr 27, 2023
- Entegris, Inc.
- Robert Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROUP VI PRECURSOR COMPOUNDS
- Publication number 20230124319
- Publication date Apr 20, 2023
- Entegris, Inc.
- David M. ERMERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION PRECURSOR COMPOUNDS AND PROCESS OF USE
- Publication number 20230041086
- Publication date Feb 9, 2023
- Entegris, Inc.
- Philip S.H. CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING CARBON RICH SILICON-CONTAINING FILMS
- Publication number 20220364225
- Publication date Nov 17, 2022
- Entegris, Inc.
- Sungsil CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION PROCESSES USING RUTHENIUM PRECURSOR AND R...
- Publication number 20220267895
- Publication date Aug 25, 2022
- Entegris, Inc.
- Philip S.H. CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROUP VI PRECURSOR COMPOUNDS
- Publication number 20220259236
- Publication date Aug 18, 2022
- Entegris, Inc.
- David M. ERMERT
- C07 - ORGANIC CHEMISTRY
Information Patent Application
PROCESS FOR PREPARING ORGANOTIN COMPOUNDS
- Publication number 20220242889
- Publication date Aug 4, 2022
- Entegris, Inc.
- David M. ERMERT
- C07 - ORGANIC CHEMISTRY
Information Patent Application
HIGH THROUGHPUT DEPOSITION PROCESS
- Publication number 20220238330
- Publication date Jul 28, 2022
- Entegris, Inc.
- Philip S.H. CHEN
- C07 - ORGANIC CHEMISTRY
Information Patent Application
PROCESS FOR PREPARING ORGANOTIN COMPOUNDS
- Publication number 20220153763
- Publication date May 19, 2022
- Entegris, Inc.
- David M. ERMERT
- C07 - ORGANIC CHEMISTRY
Information Patent Application
CARBON-FREE LAMINATED HAFNIUM OXIDE/ZIRCONIUM OXIDE FILMS FOR FERRO...
- Publication number 20220020862
- Publication date Jan 20, 2022
- Entegris, Inc.
- Jun-Fei ZHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROUP VI PRECURSOR COMPOUNDS
- Publication number 20220009953
- Publication date Jan 13, 2022
- Entegris, Inc.
- David M. ERMERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR PREPARING ORGANOTIN COMPOUNDS
- Publication number 20220002323
- Publication date Jan 6, 2022
- Entegris, Inc.
- David M. ERMERT
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHOD FOR NUCLEATION OF CONDUCTIVE NITRIDE FILMS
- Publication number 20210395882
- Publication date Dec 23, 2021
- Entegris, Inc.
- Gavin RICHARDS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION PRECURSOR COMPOUNDS AND PROCESS OF USE
- Publication number 20210388008
- Publication date Dec 16, 2021
- Entegris, Inc.
- Philip S.H. CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PREPARING IODOSILANES AND COMPOSITIONS THEREFROM
- Publication number 20210331930
- Publication date Oct 28, 2021
- Entegris, Inc.
- Scott A. LANEMAN
- C01 - INORGANIC CHEMISTRY
Information Patent Application
PRECURSORS AND METHODS FOR PREPARING SILICON-CONTAINING FILMS
- Publication number 20210301400
- Publication date Sep 30, 2021
- Entegris, Inc.
- SangJin LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON HYDRAZIDO PRECURSOR COMPOUNDS
- Publication number 20210300952
- Publication date Sep 30, 2021
- Entegris, Inc.
- Manish KHANDELWAL
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHOD FOR ETCHING OR DEPOSITION
- Publication number 20210222292
- Publication date Jul 22, 2021
- Entegris, Inc.
- Robert L. WRIGHT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRIIODOSILYLAMINE PRECURSOR COMPOUNDS
- Publication number 20210101917
- Publication date Apr 8, 2021
- Entegris, Inc.
- Manish KHANDELWAL
- C07 - ORGANIC CHEMISTRY
Information Patent Application
HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...
- Publication number 20210082708
- Publication date Mar 18, 2021
- Entegris, Inc.
- Sangbum HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUP VI METAL DEPOSITION PROCESS
- Publication number 20210062331
- Publication date Mar 4, 2021
- Entegris, Inc.
- Philip S.H. CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXYHALIDE PRECURSORS
- Publication number 20210009437
- Publication date Jan 14, 2021
- Entegris, Inc.
- David M. ERMERT
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD FOR FORMING CARBON RICH SILICON-CONTAINING FILMS
- Publication number 20200354830
- Publication date Nov 12, 2020
- Entegris, Inc.
- Sungsil CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Thomas Hall Baum

Person

Patents Grantslast 30 patents

Group VI precursor compounds

Precursors and methods for preparing silicon-containing films

Method for forming carbon rich silicon-containing films

Chemical vapor deposition processes using ruthenium precursor and r...

Method for nucleation of conductive nitride films

Oxyhalide precursors

Group VI precursor compounds

Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...

Cobalt precursors

Methods for depositing tungsten or molybdenum films

Process for preparing organotin compounds

Method for etching or deposition

Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum...

Group VI precursor compounds

Silicon hydrazido precursor compounds

Vapor deposition precursor compounds and process of use

Method for forming carbon rich silicon-containing films

Selective deposition of silicon nitride

Chemical vapor deposition processes using ruthenium precursor and r...

Process for preparing organotin compounds

Group VI precursor compounds

Aminoiodosilanes and methods of synthesizing these aminoiodosilanes

Preparation of triiodosilanes

CVD Mo deposition by using MoOCl4

Cold sintering of solid precursors

Triiodosilylamine precursor compounds

Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...

Alloys of Co to reduce stress

Aminoiodosilanes and methods of synthesizing these aminoiodosilanes

High-purity tungsten hexacarbonyl for solid source delivery

Patents Applicationslast 30 patents

CARBON-FREE LAMINATED HAFNIUM OXIDE/ZIRCONIUM OXIDE FILMS FOR FERRO...

METHOD OF PREPARING IODOSILANES AND COMPOSITIONS THEREFROM

OXHALIDE PRECURSORS

HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...

GROUP VI PRECURSOR COMPOUNDS

METHODS FOR DEPOSITING TUNGSTEN OR MOLYBDENUM FILMS

PROCESS FOR PREPARING ORGANOTIN COMPOUNDS

VAPOR DEPOSITION OF MOLYBDENUM USING A BIS(ALKYL-ARENE) MOLYBDENUM...

GROUP VI PRECURSOR COMPOUNDS

VAPOR DEPOSITION PRECURSOR COMPOUNDS AND PROCESS OF USE

METHOD FOR FORMING CARBON RICH SILICON-CONTAINING FILMS

CHEMICAL VAPOR DEPOSITION PROCESSES USING RUTHENIUM PRECURSOR AND R...

GROUP VI PRECURSOR COMPOUNDS

PROCESS FOR PREPARING ORGANOTIN COMPOUNDS

HIGH THROUGHPUT DEPOSITION PROCESS

PROCESS FOR PREPARING ORGANOTIN COMPOUNDS

CARBON-FREE LAMINATED HAFNIUM OXIDE/ZIRCONIUM OXIDE FILMS FOR FERRO...

GROUP VI PRECURSOR COMPOUNDS

PROCESS FOR PREPARING ORGANOTIN COMPOUNDS

METHOD FOR NUCLEATION OF CONDUCTIVE NITRIDE FILMS

VAPOR DEPOSITION PRECURSOR COMPOUNDS AND PROCESS OF USE

METHOD OF PREPARING IODOSILANES AND COMPOSITIONS THEREFROM

PRECURSORS AND METHODS FOR PREPARING SILICON-CONTAINING FILMS

SILICON HYDRAZIDO PRECURSOR COMPOUNDS

METHOD FOR ETCHING OR DEPOSITION

TRIIODOSILYLAMINE PRECURSOR COMPOUNDS

HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...

GROUP VI METAL DEPOSITION PROCESS

OXYHALIDE PRECURSORS

METHOD FOR FORMING CARBON RICH SILICON-CONTAINING FILMS