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Thomas Hamelin
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Georgetown, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Reduced maintenance chemical oxide removal (COR) processing system
Patent number
8,409,399
Issue date
Apr 2, 2013
Tokyo Electron Limited
Arthur H. LaFlamme
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
High throughput processing system for chemical treatment and therma...
Patent number
8,303,716
Issue date
Nov 6, 2012
Tokyo Electron Limited
Jay R. Wallace
B08 - CLEANING
Information
Patent Grant
High throughput thermal treatment system and method of operating
Patent number
8,303,715
Issue date
Nov 6, 2012
Tokyo Electron Limited
Thomas Hamelin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Post-etch treatment system for removing residue on a substrate
Patent number
8,057,633
Issue date
Nov 15, 2011
Tokyo Electron Limited
Yuji Tsukamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas distribution system for a post-etch treatment system
Patent number
8,034,176
Issue date
Oct 11, 2011
Tokyo Electron Limited
Yuji Tsukamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate holder having a fluid gap and method of fabricating the s...
Patent number
8,007,591
Issue date
Aug 30, 2011
Tokyo Electron Limited
Thomas Hamelin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing system and method for chemically treating a substrate
Patent number
7,964,058
Issue date
Jun 21, 2011
Tokyo Electron Limited
Thomas Hamelin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing system and method for treating a substrate
Patent number
7,651,583
Issue date
Jan 26, 2010
Tokyo Electron Limited
Martin Kent
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing system and method for treating a substrate
Patent number
7,462,564
Issue date
Dec 9, 2008
Tokyo Electron Limited
Thomas Hamelin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for thermally insulating adjacent temperature...
Patent number
7,214,274
Issue date
May 8, 2007
Tokyo Electron Limited
Jay Wallace
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing system and method for thermally treating a substrate
Patent number
7,079,760
Issue date
Jul 18, 2006
Tokyo Electron Limited
Thomas Hamelin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing system and method for treating a substrate
Patent number
7,029,536
Issue date
Apr 18, 2006
Tokyo Electron Limited
Thomas Hamelin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for efficient temperature control using a cont...
Patent number
6,992,892
Issue date
Jan 31, 2006
Tokyo Electron Limited
Paul Moroz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing system and method for chemically treating a substrate
Patent number
6,951,821
Issue date
Oct 4, 2005
Tokyo Electron Limited
Thomas Hamelin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Variable gap stop which can be used in a semiconductor processing d...
Patent number
6,334,398
Issue date
Jan 1, 2002
Tokyo Electron Limited
James A. Eason
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
HIGH THROUGHPUT PROCESSING SYSTEM FOR CHEMICAL TREATMENT AND THERMA...
Publication number
20130061878
Publication date
Mar 14, 2013
TOKYO ELECTRON LIMITED
Jay R. Wallace
B08 - CLEANING
Information
Patent Application
PROCESSING SYSTEM AND METHOD FOR CHEMICALLY TREATING A SUBSTRATE
Publication number
20110204029
Publication date
Aug 25, 2011
TOKYO ELECTRON LIMITED
Thomas Hamelin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
HIGH THROUGHPUT THERMAL TREATMENT SYSTEM AND METHOD OF OPERATING
Publication number
20100025368
Publication date
Feb 4, 2010
TOKYO ELECTRON LIMITED
Thomas Hamelin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH THROUGHPUT PROCESSING SYSTEM FOR CHEMICAL TREATMENT AND THERMA...
Publication number
20100024982
Publication date
Feb 4, 2010
TOKYO ELECTRON LIMITED
Jay R. Wallace
B08 - CLEANING
Information
Patent Application
Reduced Maintenance Chemical Oxide Removal (COR) Processing System
Publication number
20090226633
Publication date
Sep 10, 2009
TOKYO ELECTRON LIMITED
Arthur H. LaFlamme, JR.
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Gas distribution system for a post-etch treatment system
Publication number
20070235137
Publication date
Oct 11, 2007
TOKYO ELECTON LIMITED
Yuji Tsukamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Post-etch treatment system for removing residue on a substrate
Publication number
20070235138
Publication date
Oct 11, 2007
TOKYO ELECTON LIMITED
Yuji Tsukamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Holder Having a Fluid Gap and Method of Fabricating the S...
Publication number
20070224777
Publication date
Sep 27, 2007
TOKYO ELECTRON LIMITED
Thomas Hamelin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Processing system and method for treating a substrate
Publication number
20060134919
Publication date
Jun 22, 2006
TOKYO ELECTRON LIMITED
Thomas Hamelin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Processing system and method for treating a substrate
Publication number
20050269030
Publication date
Dec 8, 2005
TOKYO ELECTRON LIMITED
Martin Kent
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Processing system and method for chemically treating a substrate
Publication number
20050211386
Publication date
Sep 29, 2005
TOKYO ELECTRON LIMITED
Thomas Hamelin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method and apparatus for efficient temperature control using a cont...
Publication number
20050068736
Publication date
Mar 31, 2005
TOKYO ELECTRON LIMITED
Paul Moroz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for thermally insulating adjacent temperature...
Publication number
20040182324
Publication date
Sep 23, 2004
TOKYO ELECTRON LIMITED
Jay Wallace
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Reduced maintenance chemical oxide removal (COR) processing system
Publication number
20040182315
Publication date
Sep 23, 2004
TOKYO ELECTRON LIMITED
Arthur H. Laflamme
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Processing system and method for treating a substrate
Publication number
20040185670
Publication date
Sep 23, 2004
TOKYO ELECTRON LIMITED
Thomas Hamelin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Processing system and method for thermally treating a substrate
Publication number
20040184792
Publication date
Sep 23, 2004
TOKYO ELECTRON LIMITED
Thomas Hamelin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Processing system and method for chemically treating a substrate
Publication number
20040182417
Publication date
Sep 23, 2004
TOKYO ELECTRON LIMITED
Thomas Hamelin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR