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Thomas Hegemann
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Freigericht, DE
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last 30 patents
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Patent Application
Sputtering with cooled target
Publication number
20070240977
Publication date
Oct 18, 2007
Applied Materials GmbH & Co. KG
Joerg Krempel-Hesse
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Arrangement and method for the production of gas-impermeable layers
Publication number
20060027450
Publication date
Feb 9, 2006
Thomas Hegemann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...