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Thomas Henkel
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Dresden, DE
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last 30 patents
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Patent Application
Lithography mask and methods for producing a lithography mask
Publication number
20060210887
Publication date
Sep 21, 2006
Infineon Technologies AG
Thomas Henkel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Method for compensation of the shortening of line ends during the f...
Publication number
20050196686
Publication date
Sep 8, 2005
Dirk Meyer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY