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Thomas Ihl
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Aalen, DE
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last 30 patents
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Patent Grant
Optical arrangement for immersion lithography with a hydrophobic co...
Patent number
8,279,402
Issue date
Oct 2, 2012
Carl Zeiss SMT GmbH
Stephan Six
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
OPTICAL ARRANGEMENT FOR IMMERSION LITHOGRAPHY WITH A HYDROPHOBIC CO...
Publication number
20090233233
Publication date
Sep 17, 2009
Carl Zeiss SMT AG
Stephan SIX
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY