Thomas Ihl

Follow

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Optical arrangement for immersion lithography with a hydrophobic co...
- Patent number 8,279,402
- Issue date Oct 2, 2012
- Carl Zeiss SMT GmbH
- Stephan Six
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ARRANGEMENT FOR IMMERSION LITHOGRAPHY WITH A HYDROPHOBIC CO...
- Publication number 20090233233
- Publication date Sep 17, 2009
- Carl Zeiss SMT AG
- Stephan SIX
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY