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Thomas J. Haigh, JR.
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Albany, NY, US
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last 30 patents
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Patent Grant
Self-aligned composite M-MOx/dielectric cap for Cu interconnect str...
Patent number
8,299,365
Issue date
Oct 30, 2012
International Business Machines Corporation
Son Van Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
MULTILAYERED LOW k CAP WITH CONFORMAL GAP FILL AND UV STABLE COMPRE...
Publication number
20130005146
Publication date
Jan 3, 2013
Applied Materials, Inc.
Mihaela Balseanu
B82 - NANO-TECHNOLOGY
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Patent Application
MULTILAYERED LOW k CAP WITH CONFORMAL GAP FILL AND UV STABLE COMPRE...
Publication number
20120248617
Publication date
Oct 4, 2012
Applied Materials, Inc.
Mihaela Balseanu
B82 - NANO-TECHNOLOGY
Information
Patent Application
SELF-ALIGNED COMPOSITE M-MOx/DIELECTRIC CAP FOR Cu INTERCONNECT STR...
Publication number
20120175023
Publication date
Jul 12, 2012
International Business Machines Corporation
Son Van Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF-ALIGNED COMPOSITE M-MOx/DIELECTRIC CAP FOR Cu INTERCONNECT STR...
Publication number
20110162874
Publication date
Jul 7, 2011
International Business Machines Corporation
Son Van Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENGINEERED INTERCONNECT DIELECTRIC CAPS HAVING COMPRESSIVE STRESS A...
Publication number
20110012238
Publication date
Jan 20, 2011
International Business Machines Corporation
Stephan A. Cohen
H01 - BASIC ELECTRIC ELEMENTS