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Thomas James Buckley
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Ijamsville, MD, US
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma apparatus, gas distribution assembly for a plasma apparatus...
Patent number
8,580,076
Issue date
Nov 12, 2013
Lam Research Corporation
Alan Frederick Becknell
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Plasma ashing apparatus and endpoint detection process
Patent number
8,268,181
Issue date
Sep 18, 2012
Axcelis Technologies, Inc.
Aseem Kumar Srivastava
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Processes for monitoring the levels of oxygen and/or nitrogen speci...
Patent number
7,381,651
Issue date
Jun 3, 2008
Axcelis Technologies, Inc.
Palanikumaran Sakthivel
G01 - MEASURING TESTING
Information
Patent Grant
Plasma ashing process
Patent number
6,951,823
Issue date
Oct 4, 2005
Axcelis Technologies, Inc.
Carlo Waldfried
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA ASHING APPARATUS AND ENDPOINT DETECTION PROCESS
Publication number
20100055807
Publication date
Mar 4, 2010
Axcelis Technologies, Inc.
Aseem Kumar Srivastava
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Processes for monitoring the levels of oxygen and/or nitrogen speci...
Publication number
20070221620
Publication date
Sep 27, 2007
Palanikumaran Sakthivel
G01 - MEASURING TESTING
Information
Patent Application
PLASMA APPARATUS, GAS DISTRIBUTION ASSEMBLY FOR A PLASMA APPARATUS...
Publication number
20040238123
Publication date
Dec 2, 2004
Axcelis Technologies, Inc.
Alan Frederick Becknell
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
PLASMA ASHING APPARATUS AND ENDPOINT DETECTION PROCESS
Publication number
20040235299
Publication date
Nov 25, 2004
Axcelis Technologies, Inc.
Aseem Kumar Srivastava
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Plasma ashing process
Publication number
20040084412
Publication date
May 6, 2004
Carlo Waldfried
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY