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Thomas Jewell
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Wilsonville, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Use of voltage and current measurements to control dual zone cerami...
Patent number
11,028,482
Issue date
Jun 8, 2021
Lam Research Corporation
Aaron Durbin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma activated conformal film deposition
Patent number
9,230,800
Issue date
Jan 5, 2016
Novellus Systems, Inc.
Adrien LaVoie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Point of use valve manifold for semiconductor fabrication equipment
Patent number
8,985,152
Issue date
Mar 24, 2015
Novellus Systems, Inc.
Ramesh Chandrasekharan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma activated conformal film deposition
Patent number
8,728,956
Issue date
May 20, 2014
Novellus Systems, Inc.
Adrien LaVoie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
USE OF VOLTAGE AND CURRENT MEASUREMENTS TO CONTROL DUAL ZONE CERAMI...
Publication number
20200255945
Publication date
Aug 13, 2020
LAM RESEARCH CORPORATION
Aaron DURBIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
USE OF VOLTAGE AND CURRENT MEASUREMENTS TO CONTROL DUAL ZONE CERAMI...
Publication number
20190338422
Publication date
Nov 7, 2019
LAM RESEARCH CORPORATION
Aaron DURBIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA ACTIVATED CONFORMAL FILM DEPOSITION
Publication number
20140209562
Publication date
Jul 31, 2014
Novellus Systems, Inc.
Adrien LaVoie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
POINT OF USE VALVE MANIFOLD FOR SEMICONDUCTOR FABRICATION EQUIPMENT
Publication number
20130333768
Publication date
Dec 19, 2013
Ramesh Chandrasekharan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA ACTIVATED CONFORMAL FILM DEPOSITION
Publication number
20110256726
Publication date
Oct 20, 2011
Adrien LaVoie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...