Thomas J.M. Castenmiller

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Object positioning method for a lithographic projection apparatus
- Patent number 7,397,940
- Issue date Jul 8, 2008
- ASML Netherlands B.V.
- Marcus J. H. Willems van Dijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Off-axis leveling in lithographic projection apparatus
- Patent number 7,019,815
- Issue date Mar 28, 2006
- ASML Netherlands B.V.
- Johannes C. M. Jasper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measuring system for use in lithographic apparatus
- Patent number 6,894,261
- Issue date May 17, 2005
- ASML Netherlands B.V.
- Thomas J. M. Castenmiller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measuring device, position measuring system, lithographic...
- Patent number 6,875,992
- Issue date Apr 5, 2005
- ASML Netherlands B.V.
- Thomas J. M. Castenmiller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Off-axis levelling in lithographic projection apparatus
- Patent number 6,674,510
- Issue date Jan 6, 2004
- ASML Netherlands B.V.
- Johannes C. M. Jasper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of operating an optical imaging system, lithographic project...
- Patent number 6,563,564
- Issue date May 13, 2003
- ASM Lithography B.V.
- Christianus Gerardus Maria de Mol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scan module for a document copying machine
- Patent number 6,058,281
- Issue date May 2, 2000
- Oce - Technologies B.V.
- Thomas J. M. Castenmiller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ROTATABLE FRAME, LITHOGRAPHIC APPARATUS, PROJECTION SYSTEM, METHOD...
- Publication number 20160349628
- Publication date Dec 1, 2016
- ASML NETHERLANDS B.V.
- Arno Jan BLEEKER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060227310
- Publication date Oct 12, 2006
- ASML NETHERLANDS B.V.
- Erik Petrus Buurman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060215134
- Publication date Sep 28, 2006
- ASML Netherland B.V.
- Erik Petrus Buurman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, excimer laser and device manufacturing method
- Publication number 20060146310
- Publication date Jul 6, 2006
- ASML NETHERLANDS B.V.
- Robertus Cornelis Martinus De Kruif
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Off-axis levelling in lithographic projection apparatus
- Publication number 20050157281
- Publication date Jul 21, 2005
- ASML NETHERLANDS B.V.
- Johannes C.M. Jasper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Off-axis levelling in lithographic projection apparatus
- Publication number 20050088638
- Publication date Apr 28, 2005
- ASML NETHERLANDS B.V.
- Johannes C.M. Jasper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, system, method, computer program, and appar...
- Publication number 20040239905
- Publication date Dec 2, 2004
- ASML NETHERLANDS B.V.
- Tasja Van Rhee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position measuring device, position measuring system, lithographic...
- Publication number 20040211921
- Publication date Oct 28, 2004
- ASML NETHERLANDS B.V.
- Thomas J.M. Castenmiller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Off-axis levelling in lithographic projection apparatus
- Publication number 20040080737
- Publication date Apr 29, 2004
- ASML NETHERLANDS B.V.
- Johannes Christiaan Maria Jasper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, apparatus cleaning method, device manufactu...
- Publication number 20030184720
- Publication date Oct 2, 2003
- ASML NETHERLANDS, B.V.
- Gert-Jan Heerens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Object positioning method for a lithographic projection apparatus
- Publication number 20010014170
- Publication date Aug 16, 2001
- Marcus J.H. Willems van Dijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position detection system for use in lithographic apparatus
- Publication number 20010011712
- Publication date Aug 9, 2001
- Thomas J.M. Castenmiller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Thomas J.M. Castenmiller

Person

Patents Grantslast 30 patents

Object positioning method for a lithographic projection apparatus

Off-axis leveling in lithographic projection apparatus

Position measuring system for use in lithographic apparatus

Position measuring device, position measuring system, lithographic...

Off-axis levelling in lithographic projection apparatus

Method of operating an optical imaging system, lithographic project...

Scan module for a document copying machine

Patents Applicationslast 30 patents

ROTATABLE FRAME, LITHOGRAPHIC APPARATUS, PROJECTION SYSTEM, METHOD...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus, excimer laser and device manufacturing method

Off-axis levelling in lithographic projection apparatus

Off-axis levelling in lithographic projection apparatus

Lithographic apparatus, system, method, computer program, and appar...

Position measuring device, position measuring system, lithographic...

Off-axis levelling in lithographic projection apparatus

Lithographic apparatus, apparatus cleaning method, device manufactu...

Object positioning method for a lithographic projection apparatus

Position detection system for use in lithographic apparatus