Thomas K. Cho

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for improving the operation of semiconductor proc...
- Patent number 11,856,706
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Hsui Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma erosion resistant rare-earth oxide based thin film coatings
- Patent number 11,680,308
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 11,566,318
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 11,566,319
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 11,566,317
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Brazed joint and semiconductor processing chamber component having...
- Patent number 11,560,913
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Govinda Raj
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Part-life estimation utilizing feature metrology
- Patent number 11,532,466
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Chien-Min Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for actively tuning a plasma power source
- Patent number 11,398,369
- Issue date Jul 26, 2022
- Applied Materials, Inc.
- Rongping Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multinode multi-use O-ring and method for forming a seal
- Patent number 11,359,722
- Issue date Jun 14, 2022
- Applied Materials, Inc.
- Shagun P. Maheshwari
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method of reclaiming a seal
- Patent number 11,090,893
- Issue date Aug 17, 2021
- Applied Materials, Inc.
- Shagun P. Maheshwari
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Methods and systems for multi-part authentication and tracking
- Patent number 11,074,426
- Issue date Jul 27, 2021
- Applied Materials, Inc.
- Chien-Min Liao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Plasma erosion resistant rare-earth oxide based thin film coatings
- Patent number 11,053,581
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rare-earth oxide based erosion resistant coatings for semiconductor...
- Patent number 10,734,202
- Issue date Aug 4, 2020
- Applied Materials, Inc.
- Jennifer Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Symmetric chamber body design architecture to address variable proc...
- Patent number 10,727,096
- Issue date Jul 28, 2020
- Applied Materials, Inc.
- Andrew Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring concentrations of radicals in semiconductor processing
- Patent number 10,685,819
- Issue date Jun 16, 2020
- Applied Materials, Inc.
- Ramesh Gopalan
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for removing particles from a twin chamber processing system
- Patent number 10,672,591
- Issue date Jun 2, 2020
- Applied Materials, Inc.
- Andrew Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma erosion resistant rare-earth oxide based thin film coatings
- Patent number 10,501,843
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Symmetric chamber body design architecture to address variable proc...
- Patent number 10,446,418
- Issue date Oct 15, 2019
- Applied Materials, Inc.
- Andrew Nguyen
- G05 - CONTROLLING REGULATING
Information Patent Grant
Aerosol deposition coating for semiconductor chamber components
- Patent number 10,418,229
- Issue date Sep 17, 2019
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to remove residual charge on a electrostatic chuck during th...
- Patent number 10,347,522
- Issue date Jul 9, 2019
- Applied Materials, Inc.
- Wendell Glen Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inline DPS chamber hardware are design to enable axis symmetry for...
- Patent number 10,211,033
- Issue date Feb 19, 2019
- Applied Materials, Inc.
- Andrew Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma erosion resistant rare-earth oxide based thin film coatings
- Patent number 10,119,188
- Issue date Nov 6, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle reduction via throttle gate valve purge
- Patent number 10,010,912
- Issue date Jul 3, 2018
- Applied Materials, Inc.
- Jared Ahmad Lee
- B08 - CLEANING
Information Patent Grant
Rare-earth oxide based erosion resistant coatings for semiconductor...
- Patent number 9,865,434
- Issue date Jan 9, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma erosion resistant rare-earth oxide based thin film coatings
- Patent number 9,850,568
- Issue date Dec 26, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 9,797,037
- Issue date Oct 24, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for reducing particles in semiconductor proce...
- Patent number 9,761,416
- Issue date Sep 12, 2017
- Applied Materials, Inc.
- Andrew Nguyen
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 9,725,799
- Issue date Aug 8, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution blocker apparatus
- Patent number 9,714,465
- Issue date Jul 25, 2017
- Applied Materials, Inc.
- Lun Tsuei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aerosol deposition coating for semiconductor chamber components
- Patent number 9,708,713
- Issue date Jul 18, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ICP SOURCE GAS DELIVERY HUB AND NOZZLE
- Publication number 20240351055
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CCP GAS DELIVERY NOZZLE
- Publication number 20240339301
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRICAL BREAK FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20240339302
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...
- Publication number 20230167540
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PLASMA SPRAYING SILICON CARBIDE COATINGS...
- Publication number 20230051800
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- YIKAI CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PART-LIFE ESTIMATION UTILIZING FEATURE METROLOGY
- Publication number 20220020565
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Chien-Min LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS
- Publication number 20210317563
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Jennifer Y. Sun
- B32 - LAYERED PRODUCTS
Information Patent Application
METHOD AND SYSTEM FOR IMPROVING THE OPERATION OF SEMICONDUCTOR PROC...
- Publication number 20210168979
- Publication date Jun 3, 2021
- Applied Materials, Inc.
- Hsui YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR REPAIRING A RECESS OF A CHAMBER COMPONENT
- Publication number 20210035767
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Gang Grant PENG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR ACTIVELY TUNING A PLASMA POWER SOURCE
- Publication number 20200411288
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- Rongping WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS
- Publication number 20200087776
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF RECLAIMING A SEAL
- Publication number 20200079044
- Publication date Mar 12, 2020
- Applied Materials, Inc.
- Shagun P. MAHESHWARI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MULTINODE MULTI-USE O-RING AND METHOD FOR FORMING A SEAL
- Publication number 20200025292
- Publication date Jan 23, 2020
- Applied Materials, Inc.
- Shagun P. MAHESHWARI
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SYMMETRIC CHAMBER BODY DESIGN ARCHITECTURE TO ADDRESS VARIABLE PROC...
- Publication number 20190371627
- Publication date Dec 5, 2019
- Applied Materials, Inc.
- Andrew NGUYEN
- G05 - CONTROLLING REGULATING
Information Patent Application
BRAZED JOINT AND SEMICONDUCTOR PROCESSING CHAMBER COMPONENT HAVING...
- Publication number 20190226512
- Publication date Jul 25, 2019
- Applied Materials, Inc.
- Govinda RAJ
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
INLINE DPS CHAMBER HARDWARE DESIGN TO ENABLE AXIS SYMMETRY FOR IMPR...
- Publication number 20190148121
- Publication date May 16, 2019
- Applied Materials, Inc.
- Andrew NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVE MONITORING SYSTEM FOR SUBSTRATE BREAKAGE PREVENTION
- Publication number 20190043744
- Publication date Feb 7, 2019
- Applied Materials, Inc.
- Tom K. CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING CONCENTRATIONS OF RADICALS IN SEMICONDUCTOR PROCESSING
- Publication number 20180342377
- Publication date Nov 29, 2018
- Applied Materials, Inc.
- Ramesh GOPALAN
- G01 - MEASURING TESTING
Information Patent Application
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...
- Publication number 20180105922
- Publication date Apr 19, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR...
- Publication number 20180102237
- Publication date Apr 12, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS
- Publication number 20180087144
- Publication date Mar 29, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- B32 - LAYERED PRODUCTS
Information Patent Application
PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS
- Publication number 20180073125
- Publication date Mar 15, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- B32 - LAYERED PRODUCTS
Information Patent Application
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...
- Publication number 20180010235
- Publication date Jan 11, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...
- Publication number 20180010234
- Publication date Jan 11, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AEROSOL DEPOSITION COATING FOR SEMICONDUCTOR CHAMBER COMPONENTS
- Publication number 20170287683
- Publication date Oct 5, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO REMOVE RESIDUAL CHARGE ON A ELECTROSTATIC CHUCK DURING TH...
- Publication number 20170263487
- Publication date Sep 14, 2017
- Applied Materials, Inc.
- Wendell Glen BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...
- Publication number 20160326625
- Publication date Nov 10, 2016
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYMMETRIC CHAMBER BODY DESIGN ARCHITECTURE TO ADDRESS VARIABLE PROC...
- Publication number 20150293527
- Publication date Oct 15, 2015
- Applied Materials, Inc.
- Andrew NGUYEN
- G05 - CONTROLLING REGULATING
Information Patent Application
RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR...
- Publication number 20150270108
- Publication date Sep 24, 2015
- Applied Materials, Inc.
- Jennifer Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INLINE DPS CHAMBER HARDWARE DESIGN TO ENABLE AXIS SYMMETRY FOR IMPR...
- Publication number 20150218697
- Publication date Aug 6, 2015
- Applied Materials, Inc.
- Andrew NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Thomas K. Cho

Person

Patents Grantslast 30 patents

Method and system for improving the operation of semiconductor proc...

Plasma erosion resistant rare-earth oxide based thin film coatings

Ion beam sputtering with ion assisted deposition for coatings on ch...

Ion beam sputtering with ion assisted deposition for coatings on ch...

Ion beam sputtering with ion assisted deposition for coatings on ch...

Brazed joint and semiconductor processing chamber component having...

Part-life estimation utilizing feature metrology

Method and apparatus for actively tuning a plasma power source

Multinode multi-use O-ring and method for forming a seal

Method of reclaiming a seal

Methods and systems for multi-part authentication and tracking

Plasma erosion resistant rare-earth oxide based thin film coatings

Rare-earth oxide based erosion resistant coatings for semiconductor...

Symmetric chamber body design architecture to address variable proc...

Measuring concentrations of radicals in semiconductor processing

Apparatus for removing particles from a twin chamber processing system

Plasma erosion resistant rare-earth oxide based thin film coatings

Symmetric chamber body design architecture to address variable proc...

Aerosol deposition coating for semiconductor chamber components

Method to remove residual charge on a electrostatic chuck during th...

Inline DPS chamber hardware are design to enable axis symmetry for...

Plasma erosion resistant rare-earth oxide based thin film coatings

Particle reduction via throttle gate valve purge

Rare-earth oxide based erosion resistant coatings for semiconductor...

Plasma erosion resistant rare-earth oxide based thin film coatings

Ion beam sputtering with ion assisted deposition for coatings on ch...

Apparatus and methods for reducing particles in semiconductor proce...

Ion beam sputtering with ion assisted deposition for coatings on ch...

Gas distribution blocker apparatus

Aerosol deposition coating for semiconductor chamber components

Patents Applicationslast 30 patents

ICP SOURCE GAS DELIVERY HUB AND NOZZLE

CCP GAS DELIVERY NOZZLE

ELECTRICAL BREAK FOR SUBSTRATE PROCESSING SYSTEMS

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...

METHODS AND APPARATUS FOR PLASMA SPRAYING SILICON CARBIDE COATINGS...

PART-LIFE ESTIMATION UTILIZING FEATURE METROLOGY

PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS

METHOD AND SYSTEM FOR IMPROVING THE OPERATION OF SEMICONDUCTOR PROC...

METHODS FOR REPAIRING A RECESS OF A CHAMBER COMPONENT

METHOD AND APPARATUS FOR ACTIVELY TUNING A PLASMA POWER SOURCE

PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS

METHOD OF RECLAIMING A SEAL

MULTINODE MULTI-USE O-RING AND METHOD FOR FORMING A SEAL

SYMMETRIC CHAMBER BODY DESIGN ARCHITECTURE TO ADDRESS VARIABLE PROC...

BRAZED JOINT AND SEMICONDUCTOR PROCESSING CHAMBER COMPONENT HAVING...

INLINE DPS CHAMBER HARDWARE DESIGN TO ENABLE AXIS SYMMETRY FOR IMPR...

ACTIVE MONITORING SYSTEM FOR SUBSTRATE BREAKAGE PREVENTION

MEASURING CONCENTRATIONS OF RADICALS IN SEMICONDUCTOR PROCESSING

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...

RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR...

PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS

PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...

AEROSOL DEPOSITION COATING FOR SEMICONDUCTOR CHAMBER COMPONENTS

METHOD TO REMOVE RESIDUAL CHARGE ON A ELECTROSTATIC CHUCK DURING TH...

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...

SYMMETRIC CHAMBER BODY DESIGN ARCHITECTURE TO ADDRESS VARIABLE PROC...

RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR...

INLINE DPS CHAMBER HARDWARE DESIGN TO ENABLE AXIS SYMMETRY FOR IMPR...