Thomas Kemen

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus, multi-beamlet assembly, and method...
- Patent number 11,495,433
- Issue date Nov 8, 2022
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam charged particle system
- Patent number 11,087,948
- Issue date Aug 10, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device, field curvature corrector, and method...
- Patent number 10,784,070
- Issue date Sep 22, 2020
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam charged particle system
- Patent number 10,741,355
- Issue date Aug 11, 2020
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system
- Patent number 10,600,613
- Issue date Mar 24, 2020
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method of operating the same
- Patent number 10,541,112
- Issue date Jan 21, 2020
- Carl Zeiss Microscopy GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical systems and arrangements and particle-optical comp...
- Patent number 10,504,681
- Issue date Dec 10, 2019
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle inspection method and charged particle system
- Patent number 10,354,831
- Issue date Jul 16, 2019
- Carl Zeiss Microscopy GmbH
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system
- Patent number 10,147,582
- Issue date Dec 4, 2018
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method of operating the same
- Patent number 10,121,635
- Issue date Nov 6, 2018
- Carl Zeiss Microscopy GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for operating a particle optical unit
- Patent number 9,991,089
- Issue date Jun 5, 2018
- Carl Zeiss Microscopy GmbH
- Ingo Mueller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for operating a particle optical unit
- Patent number 9,799,485
- Issue date Oct 24, 2017
- Carl Zeiss Microscopy GmbH
- Ingo Mueller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical systems and arrangements and particle-optical comp...
- Patent number 9,673,024
- Issue date Jun 6, 2017
- Applied Materials Israel, Ltd.
- Rainer Knippelmeyer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Particle-optical systems and arrangements and particle-optical comp...
- Patent number 9,653,254
- Issue date May 16, 2017
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Particle beam system
- Patent number 9,552,957
- Issue date Jan 24, 2017
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focusing a charged particle system
- Patent number 9,530,613
- Issue date Dec 27, 2016
- Applied Materials Israel, Ltd.
- Steven R. Rogers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical systems and arrangements and particle-optical comp...
- Patent number 9,384,938
- Issue date Jul 5, 2016
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Particle optical system
- Patent number 9,349,571
- Issue date May 24, 2016
- Carl Zeiss Microscopy GmbH
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle inspection method and charged particle system
- Patent number 9,324,537
- Issue date Apr 26, 2016
- Applied Materials Israel, Ltd.
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle multi-beam inspection system and method of operati...
- Patent number 9,263,233
- Issue date Feb 16, 2016
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical systems and arrangements and particle-optical comp...
- Patent number 9,224,576
- Issue date Dec 29, 2015
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Focusing a charged particle imaging system
- Patent number 9,099,282
- Issue date Aug 4, 2015
- Applied Materials Israel, Ltd.
- Steven R. Rogers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical systems and arrangements and particle-optical comp...
- Patent number 8,637,834
- Issue date Jan 28, 2014
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Particle beam system
- Patent number 8,598,525
- Issue date Dec 3, 2013
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical systems and arrangements and particle-optical comp...
- Patent number 8,097,847
- Issue date Jan 17, 2012
- Carl Ziess SMT AG
- Rainer Knippelmeyer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle-optical systems, methods and components
- Patent number 8,039,813
- Issue date Oct 18, 2011
- Carl Zeiss SMT GmbH
- Antonio Casares
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical systems and arrangements and particle-optical comp...
- Patent number 7,554,094
- Issue date Jun 30, 2009
- Carl Zeiss SMT AG
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ABERRATION CORRECTOR AND METHOD OF ALIGNING ABERRATION CORRECTOR
- Publication number 20220375713
- Publication date Nov 24, 2022
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, MULTI-BEAMLET ASSEMBLY, AND METHOD...
- Publication number 20220336186
- Publication date Oct 20, 2022
- lCT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE SYSTEM
- Publication number 20200357600
- Publication date Nov 12, 2020
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE SYSTEM
- Publication number 20200251301
- Publication date Aug 6, 2020
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, FIELD CURVATURE CORRECTOR, AND METHOD...
- Publication number 20200126751
- Publication date Apr 23, 2020
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM
- Publication number 20190088440
- Publication date Mar 21, 2019
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THE SAME
- Publication number 20190066974
- Publication date Feb 28, 2019
- CARL ZEISS MICROSCOPY GMBH
- Stefan SCHUBERT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE OPTICAL UNIT
- Publication number 20180040454
- Publication date Feb 8, 2018
- CARL ZEISS MICROSCOPY GMBH
- Ingo Mueller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMP...
- Publication number 20170287674
- Publication date Oct 5, 2017
- CARL ZEISS MICROSCOPY GMBH
- Rainer KNIPPELMEYER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM
- Publication number 20170133194
- Publication date May 11, 2017
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THE SAME
- Publication number 20160247663
- Publication date Aug 25, 2016
- CARL ZEISS MICROSCOPY GMBH
- Stefan SCHUBERT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE INSPECTION METHOD AND CHARGED PARTICLE SYSTEM
- Publication number 20160240344
- Publication date Aug 18, 2016
- CARL ZEISS MICROSCOPY GMBH
- Thomas KEMEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-Optical Systems and Arrangements and Particle-Optical Comp...
- Publication number 20160155603
- Publication date Jun 2, 2016
- APPLIED MATERIALS ISRAEL LTD.
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMP...
- Publication number 20160111251
- Publication date Apr 21, 2016
- Carl Zeiss Microscopy GmbH
- Rainer KNIPPELMEYER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE OPTICAL UNIT
- Publication number 20150357157
- Publication date Dec 10, 2015
- CARL ZEISS MICROSCOPY GMBH
- Ingo Mueller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM
- Publication number 20150348738
- Publication date Dec 3, 2015
- Car Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSING A CHARGED PARTICLE SYSTEM
- Publication number 20150287568
- Publication date Oct 8, 2015
- Steven R. Rodgers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE MULTI-BEAM INSPECTION SYSTEM AND METHOD OF OPERATI...
- Publication number 20150090879
- Publication date Apr 2, 2015
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle Optical System
- Publication number 20150069235
- Publication date Mar 12, 2015
- CARL ZEISS MICROSCOPY GMBH
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE INSPECTION METHOD AND CHARGED PARTICLE SYSTEM
- Publication number 20150008331
- Publication date Jan 8, 2015
- Carl Zeiss SMT GMBH
- Thomas KEMEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSING A CHARGED PARTICLE IMAGING SYSTEM
- Publication number 20140224985
- Publication date Aug 14, 2014
- APPLIED MATERIALS ISRAEL, LTD.
- Steven R. Rodgers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-Optical Systems and Arrangements and Particle-Optical Comp...
- Publication number 20140158902
- Publication date Jun 12, 2014
- APPLIED MATERIALS ISRAEL, LTD.
- Rainer Knippelmeyer
- B82 - NANO-TECHNOLOGY
Information Patent Application
Particle-Optical Systems and Arrangements and Particle-Optical Comp...
- Publication number 20130187046
- Publication date Jul 25, 2013
- Carl Zeiss SMT GMBH
- Dirk Zeidler
- B82 - NANO-TECHNOLOGY
Information Patent Application
Particle Beam System
- Publication number 20120199740
- Publication date Aug 9, 2012
- CARL ZEISS NTS GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-Optical Systems and Arrangements and Particle-Optical Comp...
- Publication number 20120104252
- Publication date May 3, 2012
- Applied Materials Israel Ltd.
- Rainer KNIPPELMEYER
- B82 - NANO-TECHNOLOGY
Information Patent Application
Particle-optical systems and arrangements and particle-optical comp...
- Publication number 20100181479
- Publication date Jul 22, 2010
- Rainer Knippelmeyer
- B82 - NANO-TECHNOLOGY
Information Patent Application
Charged Particle Inspection Method and Charged Particle System
- Publication number 20090256075
- Publication date Oct 15, 2009
- Carl Zeiss SMT AG
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-Optical Component
- Publication number 20090114818
- Publication date May 7, 2009
- Carl Zeiss SMT AG
- Antonio Casares
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-optical systems and arrangements and particle-optical comp...
- Publication number 20080054184
- Publication date Mar 6, 2008
- Carl Zeiss SMT AG
- Rainer Knippelmeyer
- B82 - NANO-TECHNOLOGY

Thomas Kemen

Person

Patents Grantslast 30 patents

Charged particle beam apparatus, multi-beamlet assembly, and method...

Multi-beam charged particle system

Charged particle beam device, field curvature corrector, and method...

Multi-beam charged particle system

Particle beam system

Charged particle beam system and method of operating the same

Particle-optical systems and arrangements and particle-optical comp...

Charged particle inspection method and charged particle system

Particle beam system

Charged particle beam system and method of operating the same

Particle beam system and method for operating a particle optical unit

Particle beam system and method for operating a particle optical unit

Particle-optical systems and arrangements and particle-optical comp...

Particle-optical systems and arrangements and particle-optical comp...

Particle beam system

Focusing a charged particle system

Particle-optical systems and arrangements and particle-optical comp...

Particle optical system

Charged particle inspection method and charged particle system

Charged particle multi-beam inspection system and method of operati...

Particle-optical systems and arrangements and particle-optical comp...

Focusing a charged particle imaging system

Particle-optical systems and arrangements and particle-optical comp...

Particle beam system

Particle-optical systems and arrangements and particle-optical comp...

Charged particle-optical systems, methods and components

Particle-optical systems and arrangements and particle-optical comp...

Patents Applicationslast 30 patents

ABERRATION CORRECTOR AND METHOD OF ALIGNING ABERRATION CORRECTOR

CHARGED PARTICLE BEAM APPARATUS, MULTI-BEAMLET ASSEMBLY, AND METHOD...

MULTI-BEAM CHARGED PARTICLE SYSTEM

MULTI-BEAM CHARGED PARTICLE SYSTEM

CHARGED PARTICLE BEAM DEVICE, FIELD CURVATURE CORRECTOR, AND METHOD...

PARTICLE BEAM SYSTEM

CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THE SAME

PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE OPTICAL UNIT

PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMP...

PARTICLE BEAM SYSTEM

CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THE SAME

CHARGED PARTICLE INSPECTION METHOD AND CHARGED PARTICLE SYSTEM

Particle-Optical Systems and Arrangements and Particle-Optical Comp...

PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMP...

PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE OPTICAL UNIT

PARTICLE BEAM SYSTEM

FOCUSING A CHARGED PARTICLE SYSTEM

CHARGED PARTICLE MULTI-BEAM INSPECTION SYSTEM AND METHOD OF OPERATI...

Particle Optical System

CHARGED PARTICLE INSPECTION METHOD AND CHARGED PARTICLE SYSTEM

FOCUSING A CHARGED PARTICLE IMAGING SYSTEM

Particle-Optical Systems and Arrangements and Particle-Optical Comp...

Particle-Optical Systems and Arrangements and Particle-Optical Comp...

Particle Beam System

Particle-Optical Systems and Arrangements and Particle-Optical Comp...

Particle-optical systems and arrangements and particle-optical comp...

Charged Particle Inspection Method and Charged Particle System

Particle-Optical Component

Particle-optical systems and arrangements and particle-optical comp...