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Thomas Krücken
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Aachen, DE
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last 30 patents
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Patent Grant
Gas distributor for a CVD reactor
Patent number
10,221,482
Issue date
Mar 5, 2019
Aixtron SE
Thomas Krücken
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
MOCVD layer growth method with subsequent multi-stage cleaning step
Patent number
9,670,580
Issue date
Jun 6, 2017
Aixtron SE
Martin Eickelkamp
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
MOCVD LAYER GROWTH METHOD WITH SUBSEQUENT MULTI-STAGE CLEANING STEP
Publication number
20160076145
Publication date
Mar 17, 2016
AIXTRON SE
Martin EICKELKAMP
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas distributor for a CVD reactor
Publication number
20140231550
Publication date
Aug 21, 2014
Thomas Krücken
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...