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Thomas Krieg
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Solms, DE
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last 30 patents
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Patent Grant
Apparatus for inspecting a disk-like object
Patent number
7,489,394
Issue date
Feb 10, 2009
Vistec Semiconductor Systems GmbH
Joachim Wienecke
G01 - MEASURING TESTING
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Patent Grant
Apparatus and method for inspecting a semiconductor component
Patent number
7,268,867
Issue date
Sep 11, 2007
Vistec Semiconductor Systems GmbH
Wolfgang Vollrath
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Apparatus for inspecting a disk-like object
Publication number
20060245965
Publication date
Nov 2, 2006
Vistec Semiconductor Systems GmbH
Joachim Wienecke
G01 - MEASURING TESTING
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Patent Application
Apparatus and method for inspecting a semiconductor component
Publication number
20050219521
Publication date
Oct 6, 2005
Leica Microsystems Semiconductor GmbH
Wolfgang Vollrath
G01 - MEASURING TESTING