Thomas L. Duft

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Franklin, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
X-ray lithography system
- Patent number 4,980,896
- Issue date Dec 25, 1990
- Hampshire Instruments, Inc.
- James M. Forsyth
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Gap sensing/adjustment apparatus and method for a lithography machine
- Patent number 4,870,668
- Issue date Sep 26, 1989
- Hampshire Instruments, Inc.
- Robert D. Frankel
- B82 - NANO-TECHNOLOGY