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Thomas L. MAGUIRE
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Curved RF electrode for improved Cmax
Patent number
9,711,290
Issue date
Jul 18, 2017
Cavendish Kinetics, Inc.
Mickael Renault
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of forming planar sacrificial material in a MEMS device
Patent number
9,487,395
Issue date
Nov 8, 2016
Cavendish Kinetics, Inc.
Brian I. Troy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for MEMS device fabrication and device formed
Patent number
8,921,953
Issue date
Dec 30, 2014
Cavendish Kinetics, Inc.
Mickael Renault
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Elimination of silicon residues from MEMS cavity floor
Patent number
8,921,165
Issue date
Dec 30, 2014
Cavendish Kinetics, Inc.
Brian I. Troy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for MEMS device fabrication and device formed
Patent number
8,513,043
Issue date
Aug 20, 2013
Cavendish Kinetics Inc.
Mickael Renault
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMP process flow for MEMS
Patent number
8,124,527
Issue date
Feb 28, 2012
Cavendish Kinetics, Inc.
Joseph Damian Gordon Lacey
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
CURVED RF ELECTRODE FOR IMPROVED CMAX
Publication number
20160240320
Publication date
Aug 18, 2016
CAVENDISH KINETICS, INC.
Mickael RENAULT
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FORMING PLANAR SACRIFICIAL MATERIAL IN A MEMS DEVICE
Publication number
20160207763
Publication date
Jul 21, 2016
CAVENDISH KINETICS, INC.
Brian I. TROY
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MEMS DEVICE FABRICATION AND DEVICE FORMED
Publication number
20130299926
Publication date
Nov 14, 2013
Mickael RENAULT
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELIMINATION OF SILICON RESIDUES FROM MEMS CAVITY FLOOR
Publication number
20130032453
Publication date
Feb 7, 2013
CAVENDISH KINETICS INC.
Brian I. Troy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MEMS DEVICE FABRICATION AND DEVICE FORMED
Publication number
20120181638
Publication date
Jul 19, 2012
Mickael Renault
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMP Process Flow for MEMS
Publication number
20110212593
Publication date
Sep 1, 2011
Joseph Damian Gordon Lacey
B81 - MICRO-STRUCTURAL TECHNOLOGY