Thomas Li

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Training a machine learning system to detect an excursion of a CMP...
- Patent number 12,148,149
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Sidney P. Huey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Detecting an excursion of a CMP component using time-based sequence...
- Patent number 12,079,984
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Sidney P. Huey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Preston matrix generator
- Patent number 11,989,492
- Issue date May 21, 2024
- Applied Materials, Inc.
- Sivakumar Dhandapani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Motor torque endpoint during polishing with spatial resolution
- Patent number 11,980,995
- Issue date May 14, 2024
- Applied Materials, Inc.
- Thomas Li
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing slurry buildup monitoring
- Patent number 11,890,722
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Thomas Ho Fai Li
- B24 - GRINDING POLISHING
Information Patent Grant
Detecting an excursion of a CMP component using time-based sequence...
- Patent number 11,710,228
- Issue date Jul 25, 2023
- Applied Materials, Inc.
- Sidney P. Huey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Retaining ring for CMP
- Patent number 11,673,226
- Issue date Jun 13, 2023
- Applied Materials, Inc.
- Andrew J. Nagengast
- B24 - GRINDING POLISHING
Information Patent Grant
System and process for in situ byproduct removal and platen cooling...
- Patent number 10,350,728
- Issue date Jul 16, 2019
- Applied Materials, Inc.
- Jie Diao
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring for CMP
- Patent number 10,322,492
- Issue date Jun 18, 2019
- Applied Materials, Inc.
- Andrew J. Nagengast
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad cleaning with vacuum apparatus
- Patent number 9,498,866
- Issue date Nov 22, 2016
- Applied Materials, Inc.
- Christopher Heung-Gyun Lee
- B24 - GRINDING POLISHING
Information Patent Grant
Path for probe of spectrographic metrology system
- Patent number 9,056,383
- Issue date Jun 16, 2015
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
MACHINE LEARNING MODEL TRAINING
- Publication number 20240393262
- Publication date Nov 28, 2024
- Applied Materials, Inc.
- Jeong Jin Hong
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...
- Publication number 20240378718
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Sidney P. Huey
- B24 - GRINDING POLISHING
Information Patent Application
ADJUSTING CHAMBER PERFORMANCE BY EQUIPMENT CONSTANT UPDATES
- Publication number 20240176334
- Publication date May 30, 2024
- Applied Materials, Inc.
- Sidharth Bhatia
- G05 - CONTROLLING REGULATING
Information Patent Application
DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING
- Publication number 20240176338
- Publication date May 30, 2024
- Applied Materials, Inc.
- Thomas Ho Fai Li
- G05 - CONTROLLING REGULATING
Information Patent Application
DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING
- Publication number 20240176312
- Publication date May 30, 2024
- Applied Materials, Inc.
- Sidharth Bhatia
- G05 - CONTROLLING REGULATING
Information Patent Application
CHAMBER MATCHING BY EQUIPMENT CONSTANT UPDATES
- Publication number 20240176336
- Publication date May 30, 2024
- Applied Materials, Inc.
- Sidharth Bhatia
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS AND SYSTEMS FOR A SPECTRAL LIBRARY AT A MANUFACTURING SYSTEM
- Publication number 20240128100
- Publication date Apr 18, 2024
- Applied Materials, Inc.
- Hsinyi Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRAINING A MACHINE LEARNING SYSTEM TO DETECT AN EXCURSION OF A CMP...
- Publication number 20230316502
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Sidney P. Huey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETERMINING SUBSTRATE PROFILE PROPERTIES USING MACHINE LEARNING
- Publication number 20230062206
- Publication date Mar 2, 2023
- Applied Materials, Inc.
- Thomas Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHEMICAL MECHANICAL POLISHING SLURRY BUILDUP MONITORING
- Publication number 20220314395
- Publication date Oct 6, 2022
- Applied Materias, Inc.
- Thomas Ho Fai LI
- B24 - GRINDING POLISHING
Information Patent Application
IN-SITU MONITORING TO LABEL TRAINING SPECTRA FOR MACHINE LEARNING S...
- Publication number 20220283082
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Thomas Li
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PRESSURE SIGNALS DURING MOTOR TORQUE MONITORING TO PROVIDE SPATIAL...
- Publication number 20220281059
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Thomas Li
- B24 - GRINDING POLISHING
Information Patent Application
PRESSURE SIGNALS WITH DIFFERENT FREQUENCIES DURING FRICTION MONITOR...
- Publication number 20220281060
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Thomas Li
- B24 - GRINDING POLISHING
Information Patent Application
MOTOR TORQUE ENDPOINT DURING POLISHING WITH SPATIAL RESOLUTION
- Publication number 20220281066
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Thomas Li
- B24 - GRINDING POLISHING
Information Patent Application
DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...
- Publication number 20220284560
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Sidney P. Huey
- B24 - GRINDING POLISHING
Information Patent Application
DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...
- Publication number 20220284561
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Sidney P. Huey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Preston Matrix Generator
- Publication number 20200210547
- Publication date Jul 2, 2020
- Applied Materials, Inc.
- Sivakumar Dhandapani
- B24 - GRINDING POLISHING
Information Patent Application
RETAINING RING FOR CMP
- Publication number 20190291238
- Publication date Sep 26, 2019
- Applied Materials, Inc.
- Andrew J. Nagengast
- B24 - GRINDING POLISHING
Information Patent Application
RETAINING RING FOR CMP
- Publication number 20180021918
- Publication date Jan 25, 2018
- Andrew J. Nagengast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND PROCESS FOR IN SITU BYPRODUCT REMOVAL AND PLATEN COOLING...
- Publication number 20160167195
- Publication date Jun 16, 2016
- Applied Materials, Inc.
- Jie DIAO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING PAD CLEANING WITH VACUUM APPARATUS
- Publication number 20140273763
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Christopher Heung-Gyun LEE
- B24 - GRINDING POLISHING
Information Patent Application
PATH FOR PROBE OF SPECTROGRAPHIC METROLOGY SYSTEM
- Publication number 20140242879
- Publication date Aug 28, 2014
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Application
DETERMINATION OF WAFER ANGULAR POSITION FOR IN-SEQUENCE METROLOGY
- Publication number 20140242883
- Publication date Aug 28, 2014
- Applied Materials, Inc.
- Benjamin Cherian
- B24 - GRINDING POLISHING

Person

Patents Grantslast 30 patents

Training a machine learning system to detect an excursion of a CMP...

Detecting an excursion of a CMP component using time-based sequence...

Preston matrix generator

Motor torque endpoint during polishing with spatial resolution

Chemical mechanical polishing slurry buildup monitoring

Detecting an excursion of a CMP component using time-based sequence...

Retaining ring for CMP

System and process for in situ byproduct removal and platen cooling...

Retaining ring for CMP

Polishing pad cleaning with vacuum apparatus

Path for probe of spectrographic metrology system

Patents Applicationslast 30 patents

MACHINE LEARNING MODEL TRAINING

DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...

ADJUSTING CHAMBER PERFORMANCE BY EQUIPMENT CONSTANT UPDATES

DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING

DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING

CHAMBER MATCHING BY EQUIPMENT CONSTANT UPDATES

METHODS AND SYSTEMS FOR A SPECTRAL LIBRARY AT A MANUFACTURING SYSTEM

TRAINING A MACHINE LEARNING SYSTEM TO DETECT AN EXCURSION OF A CMP...

DETERMINING SUBSTRATE PROFILE PROPERTIES USING MACHINE LEARNING

CHEMICAL MECHANICAL POLISHING SLURRY BUILDUP MONITORING

IN-SITU MONITORING TO LABEL TRAINING SPECTRA FOR MACHINE LEARNING S...

PRESSURE SIGNALS DURING MOTOR TORQUE MONITORING TO PROVIDE SPATIAL...

PRESSURE SIGNALS WITH DIFFERENT FREQUENCIES DURING FRICTION MONITOR...

MOTOR TORQUE ENDPOINT DURING POLISHING WITH SPATIAL RESOLUTION

DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...

DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...

Preston Matrix Generator

RETAINING RING FOR CMP

RETAINING RING FOR CMP

SYSTEM AND PROCESS FOR IN SITU BYPRODUCT REMOVAL AND PLATEN COOLING...

POLISHING PAD CLEANING WITH VACUUM APPARATUS

PATH FOR PROBE OF SPECTROGRAPHIC METROLOGY SYSTEM

DETERMINATION OF WAFER ANGULAR POSITION FOR IN-SEQUENCE METROLOGY