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Buhl, DE
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last 30 patents
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Patent Grant
Electric supply unit and method for reducing arcing during sputtering
Patent number
6,740,207
Issue date
May 25, 2004
Unaxis Deutschland GmbH
Andreas Kloeppel
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Electric supply unit and method for reducing arcing during sputtering
Publication number
20020104753
Publication date
Aug 8, 2002
Andreas Kloeppel
H01 - BASIC ELECTRIC ELEMENTS