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Thomas M. Rathmann
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Rohnert Park, CA, US
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last 30 patents
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Patent Grant
Modular article processing machine and method of article handling t...
Patent number
4,801,241
Issue date
Jan 31, 1989
Tegal Corporation
John Zajac
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Article transport apparatus
Patent number
4,619,573
Issue date
Oct 28, 1986
Tegal Corporation
Thomas M. Rathmann
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma reactor chuck assembly
Patent number
4,547,247
Issue date
Oct 15, 1985
Tegal Corporation
Douglas H. Warenback
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...