Thomas M. Wagner

Person

  • South Burlington, VT, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Photoresist trimming process

    • Patent number 7,960,288
    • Issue date Jun 14, 2011
    • International Business Machines Corporation
    • Shaun Crawford
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Photoresist trimming process

    • Patent number 7,955,988
    • Issue date Jun 7, 2011
    • International Business Machines Corporation
    • Shaun Crawford
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Photoresist trimming process

    • Patent number 7,304,000
    • Issue date Dec 4, 2007
    • International Business Machines Corporation
    • Shaun Crawford
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    CD uniformity of chrome etch to photomask process

    • Patent number 7,014,959
    • Issue date Mar 21, 2006
    • International Business Machines Corporation
    • Shaun B. Crawford
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of inhibiting contaminants using dilute acid rinse

    • Patent number 6,758,912
    • Issue date Jul 6, 2004
    • International Business Machines Corporation
    • Virginia Chi-Chuen Chao
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Method of minimizing contaminating deposits using dilute acid rinse

    • Patent number 6,494,966
    • Issue date Dec 17, 2002
    • International Business Machines Corporation
    • Virginia Chi-Chuen Chao
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Dilute acid rinse after develop for chrome etch

    • Patent number 6,162,565
    • Issue date Dec 19, 2000
    • International Business Machines Corporation
    • Virginia Chi-Chuen Chao
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

  • Information Patent Application

    PHOTORESIST TRIMMING PROCESS

    • Publication number 20080032214
    • Publication date Feb 7, 2008
    • International Business Machines Corporation
    • Shaun Crawford
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PHOTORESIST TRIMMING PROCESS

    • Publication number 20080020586
    • Publication date Jan 24, 2008
    • International Business Machines Corporation
    • Shaun Crawford
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PHOTORESIST TRIMMING PROCESS

    • Publication number 20060040504
    • Publication date Feb 23, 2006
    • International Business Machines Corporation
    • Shaun Crawford
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    IMPROVED CD UNIFORMITY OF CHROME ETCH TO PHOTOMASK PROCESS

    • Publication number 20040262264
    • Publication date Dec 30, 2004
    • International Business Machines Corporation
    • Shaun B. Crawford
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method of inhibiting contaminants using dilute acid rinse

    • Publication number 20030051740
    • Publication date Mar 20, 2003
    • Virginia Chi-Chuen Chao
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Method of minimizing contaminating deposits using dilute acid rinse

    • Publication number 20010001958
    • Publication date May 31, 2001
    • Virginia Chi-Chuen Chao
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY