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Thomas Martens
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Krombach, DE
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last 30 patents
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Patent Grant
Arrangement for measuring the light radiation of a plasma
Patent number
5,209,830
Issue date
May 11, 1993
Leybold Aktiengesellschaft
Thomas Martens
G01 - MEASURING TESTING
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Patent Grant
Apparatus for etching substrates with a luminous discharge
Patent number
4,954,201
Issue date
Sep 4, 1990
Leybold Aktiengesellschaft
Rudolf Latz
H01 - BASIC ELECTRIC ELEMENTS