Thomas Maximilian Gebhart

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Uffing, DE

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Patents Grantslast 30 patents

Information Patent Grant
System and methods for polishing a wafer
- Patent number 7,378,355
- Issue date May 27, 2008
- Semitool, Inc.
- Eric J. Bergman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process and apparatus for treating a workpiece using ozone
- Patent number 7,264,680
- Issue date Sep 4, 2007
- Semitool, Inc.
- Thomas Maximilia Gebhart
- B08 - CLEANING
Information Patent Grant
Strip detector
- Patent number 6,184,562
- Issue date Feb 6, 2001
- Max-Planck-Gesellschaft Zur
- Josef Kemmer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
System and methods for polishing a wafer
- Publication number 20050236363
- Publication date Oct 27, 2005
- Eric J. Bergman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process and apparatus for treating a workpiece using ozone
- Publication number 20040216763
- Publication date Nov 4, 2004
- Semitool, Inc.
- Thomas Maximilian Gebhart
- B08 - CLEANING