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Thomas McClard
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Fremont, CA, US
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last 30 patents
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Patent Grant
Methods for protecting silicon or silicon carbide electrode surface...
Patent number
7,226,869
Issue date
Jun 5, 2007
Lam Research Corporation
Kenji Takeshita
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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last 30 patents
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Patent Application
Methods for protecting silicon or silicon carbide electrode surface...
Publication number
20060091104
Publication date
May 4, 2006
Kenji Takeshita
B08 - CLEANING