Thomas Muelders

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Methods of compensating lens heating, lithographic projection syste...
- Patent number 7,855,776
- Issue date Dec 21, 2010
- Qimonda AG
- Bernd Kuechler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for improving the imaging properties of a projection objecti...
- Patent number 7,456,933
- Issue date Nov 25, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for projecting a pattern into an image plane
- Patent number 7,339,652
- Issue date Mar 4, 2008
- Infineon Technologies AG
- Molela Moukara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Methods of Compensating Lens Heating, Lithographic Projection Syste...
- Publication number 20090244502
- Publication date Oct 1, 2009
- Bernd Kuechler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for automatically generating at least one of a mask layout a...
- Publication number 20080010627
- Publication date Jan 10, 2008
- Thomas Muelders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for Automatically Generating at Least One of a Mask Layout a...
- Publication number 20080008972
- Publication date Jan 10, 2008
- Thomas Muelders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Arrangement for the transfer of structural elements of a photomask...
- Publication number 20070229790
- Publication date Oct 4, 2007
- Bernd Kuechler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for photolithography
- Publication number 20070009816
- Publication date Jan 11, 2007
- Rainer Pforr
- G02 - OPTICS
Information Patent Application
Photolithographic imaging device and apparatus for generating an il...
- Publication number 20060256313
- Publication date Nov 16, 2006
- Kerstin Renner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus for projecting a pattern into an image plane
- Publication number 20060181691
- Publication date Aug 17, 2006
- Molela Moukara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for making an optical system with coated optical components...
- Publication number 20060132917
- Publication date Jun 22, 2006
- Carl Zeiss SMT AG
- Christoph Zaczek
- G02 - OPTICS
Information Patent Application
Method for improving the imaging properties of a projection objecti...
- Publication number 20060077371
- Publication date Apr 13, 2006
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Catadioptric reduction objective having a polarization beamsplitter
- Publication number 20050243435
- Publication date Nov 3, 2005
- Carl Zeiss SMT AG
- Christoph Zaczek
- G02 - OPTICS

Thomas Muelders

Person

Patents Grantslast 30 patents

Methods of compensating lens heating, lithographic projection syste...

Method for improving the imaging properties of a projection objecti...

Apparatus for projecting a pattern into an image plane

Patents Applicationslast 30 patents

Methods of Compensating Lens Heating, Lithographic Projection Syste...

Method for automatically generating at least one of a mask layout a...

Method for Automatically Generating at Least One of a Mask Layout a...

Arrangement for the transfer of structural elements of a photomask...

Method and system for photolithography

Photolithographic imaging device and apparatus for generating an il...

Apparatus for projecting a pattern into an image plane

Method for making an optical system with coated optical components...

Method for improving the imaging properties of a projection objecti...

Catadioptric reduction objective having a polarization beamsplitter