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Thomas Mussenbrock
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Wuppertal, DE
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last 30 patents
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Patent Grant
Device and use of the device for measuring the density and/or the e...
Patent number
9,113,543
Issue date
Aug 18, 2015
Ruhr-Universität Bochum
Ralf Peter Brinkmann
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Grant
Method for controlling ion energy in radio frequency plasmas
Patent number
8,933,629
Issue date
Jan 13, 2015
Ruhr-Universität Bochum
Brian George Heil
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for controlling ion energy in radio frequency plasmas
Patent number
8,643,280
Issue date
Feb 4, 2014
Ruhr-Universität Bochum
Brian George Heil
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS
Publication number
20140103808
Publication date
Apr 17, 2014
RUHR-UNIVERSITÄT BOCHUM
Brian George Heil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND USE OF THE DEVICE FOR MEASURING THE DENSITY AND/OR THE E...
Publication number
20130160523
Publication date
Jun 27, 2013
RUHR-UNIVERSITÄT BOCHUM
Ralf Peter Brinkmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS
Publication number
20110248634
Publication date
Oct 13, 2011
RUHR-UNIVERSITAT
Brian George Heil
H01 - BASIC ELECTRIC ELEMENTS