THOMAS NEAL HORSKY

Person

BOXBOROUGH, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma generator with at least one non-metallic component
- Patent number 9,865,422
- Issue date Jan 9, 2018
- Nissin Ion Equipment Co., Ltd.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion source having at least one electron gun comprising a gas inlet...
- Patent number 8,994,272
- Issue date Mar 31, 2015
- Nissin Ion Equipment Co., Ltd.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation device and a method of semiconductor manufacturing...
- Patent number 8,618,514
- Issue date Dec 31, 2013
- Semequip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation with molecular ions containing phosphorus and arsenic
- Patent number 8,586,459
- Issue date Nov 19, 2013
- SemEquip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for the manufacture of semiconductor devices by t...
- Patent number 8,530,343
- Issue date Sep 10, 2013
- Semequip, Inc.
- Wade A. Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
External cathode ion source
- Patent number 8,502,161
- Issue date Aug 6, 2013
- Semequip, Inc.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam apparatus and method employing magnetic scanning
- Patent number 8,436,326
- Issue date May 7, 2013
- Semequip, Inc.
- Hilton F. Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation device and a method of semiconductor manufacturing...
- Patent number 8,410,459
- Issue date Apr 2, 2013
- Semequip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for extracting ions from an ion source for use...
- Patent number 8,368,309
- Issue date Feb 5, 2013
- Semequip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi mode ion source
- Patent number 8,330,118
- Issue date Dec 11, 2012
- Semequip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation ion source, system and method
- Patent number 8,154,210
- Issue date Apr 10, 2012
- Semequip, Inc.
- Thomas Neil Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam apparatus and method for ion implantation
- Patent number 8,110,820
- Issue date Feb 7, 2012
- SemEquip, Inc.
- Hilton F. Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for the manufacture of semiconductor devices by t...
- Patent number 8,097,529
- Issue date Jan 17, 2012
- Semequip, Inc.
- Wade A. Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation device and a method of semiconductor manufacturing...
- Patent number 8,071,958
- Issue date Dec 6, 2011
- Semequip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing CMOS devices by the implantation of N- and...
- Patent number 7,994,031
- Issue date Aug 9, 2011
- Semequip, Inc.
- Thomas Neil Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation device and a method of semiconductor manufacturing...
- Patent number 7,960,709
- Issue date Jun 14, 2011
- SemEquip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for extracting ion beams composed of molecular io...
- Patent number 7,928,406
- Issue date Apr 19, 2011
- Semequip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster ion implantation for defect engineering
- Patent number 7,919,402
- Issue date Apr 5, 2011
- Semequip, Inc.
- Dale C. Jacobson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam apparatus and method employing magnetic scanning
- Patent number 7,851,773
- Issue date Dec 14, 2010
- Semiquip, Inc.
- Hilton F. Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
External cathode ion source
- Patent number 7,838,850
- Issue date Nov 23, 2010
- Semequip, Inc.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual mode ion source for ion implantation
- Patent number 7,838,842
- Issue date Nov 23, 2010
- Semequip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual mode ion source for ion implantation
- Patent number 7,834,554
- Issue date Nov 16, 2010
- Semequip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for extending equipment uptime in ion implanta...
- Patent number 7,820,981
- Issue date Oct 26, 2010
- Semequip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual mode ion source for ion implantation
- Patent number 7,800,312
- Issue date Sep 21, 2010
- Semequip, Inc.
- Thomas Neil Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for extracting ions from an ion source for use...
- Patent number 7,791,047
- Issue date Sep 7, 2010
- Semequip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation ion source, system and method
- Patent number 7,732,787
- Issue date Jun 8, 2010
- SemEquip, Inc.
- Thomas Neil Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controlling the flow of vapors sublimated from solids
- Patent number 7,723,700
- Issue date May 25, 2010
- Semequip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for the manufacture of semiconductor devices by t...
- Patent number 7,666,771
- Issue date Feb 23, 2010
- Semequip, Inc.
- Wade A. Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for extending equipment uptime in ion implanta...
- Patent number 7,629,590
- Issue date Dec 8, 2009
- Semequip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation system and control method
- Patent number 7,609,003
- Issue date Oct 27, 2009
- SemEquip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plasma Generator With at Least One Non-Metallic Component
- Publication number 20160086759
- Publication date Mar 24, 2016
- NISSIN ION EQUIPMENT CO., LTD.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Source
- Publication number 20140265854
- Publication date Sep 18, 2014
- NISSIN ION EQUIPMENT CO., LTD.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING...
- Publication number 20140061816
- Publication date Mar 6, 2014
- SemEquip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS FLOW SYSTEM, DEVICE AND METHOD
- Publication number 20130118596
- Publication date May 16, 2013
- THOMAS NEAL HORSKY
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
Gas flow device
- Publication number 20130118609
- Publication date May 16, 2013
- Thomas Neil Horsky
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING...
- Publication number 20120076475
- Publication date Mar 29, 2012
- SemEquip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPORIZER
- Publication number 20120064705
- Publication date Mar 15, 2012
- SemEquip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY T...
- Publication number 20110306193
- Publication date Dec 15, 2011
- SemEquip, Inc.
- Wade A. Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING...
- Publication number 20110226969
- Publication date Sep 22, 2011
- SemEquip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM APPARATUS AND METHOD EMPLOYING MAGNETIC SCANNING
- Publication number 20110089321
- Publication date Apr 21, 2011
- SemEquip, Inc.
- Hilton F. Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTERNAL CATHODE ION SOURCE
- Publication number 20100320395
- Publication date Dec 23, 2010
- SemEquip, Inc.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
- Publication number 20100148089
- Publication date Jun 17, 2010
- Thomas Neil Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for extracting ions from an ion source for use...
- Publication number 20100107980
- Publication date May 6, 2010
- SemEquip
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY T...
- Publication number 20090286367
- Publication date Nov 19, 2009
- Wade A. Krull
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI MODE ION SOURCE
- Publication number 20090283695
- Publication date Nov 19, 2009
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM APPARATUS AND METHOD EMPLOYING MAGNETIC SCANNING
- Publication number 20090261248
- Publication date Oct 22, 2009
- Hilton F. Glavish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DELIVERY SYSTEM USEFUL WITH ION SOURCES AND VAPORIZERS FOR US...
- Publication number 20090206281
- Publication date Aug 20, 2009
- Dror Oved
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM APPARATUS AND METHOD FOR ION IMPLANTATION
- Publication number 20090206270
- Publication date Aug 20, 2009
- SEMEQUIP, INC.
- Hilton F. Glayish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING...
- Publication number 20090090872
- Publication date Apr 9, 2009
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTERNAL CATHODE ION SOURCE
- Publication number 20090014667
- Publication date Jan 15, 2009
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING...
- Publication number 20080305598
- Publication date Dec 11, 2008
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER ION IMPLANTATION FOR DEFECT ENGINEERING
- Publication number 20080299749
- Publication date Dec 4, 2008
- Dale C. Jacobson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR EXTRACTING ION BEAMS COMPOSED OF MOLECULAR IO...
- Publication number 20080290266
- Publication date Nov 27, 2008
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR EXTENDING EQUIPMENT UPTIME IN ION IMPLANTA...
- Publication number 20080223409
- Publication date Sep 18, 2008
- Thomas N. Horsky
- B08 - CLEANING
Information Patent Application
Method and apparatus for extending equipment uptime in ion implanta...
- Publication number 20080121811
- Publication date May 29, 2008
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion Implantation Device and a Method of Semiconductor Manufacturing...
- Publication number 20080122005
- Publication date May 29, 2008
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL MODE ION SOURCE FOR ION IMPLANTATION
- Publication number 20080087219
- Publication date Apr 17, 2008
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Controlling the flow of vapors sublimated from solids
- Publication number 20080073559
- Publication date Mar 27, 2008
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Controlling The Flow Of Vapors Sublimated From Solids
- Publication number 20080047607
- Publication date Feb 28, 2008
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dual mode ion source for ion implantation
- Publication number 20080042580
- Publication date Feb 21, 2008
- SemEquip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

THOMAS NEAL HORSKY

Person

Patents Grantslast 30 patents

Plasma generator with at least one non-metallic component

Ion source having at least one electron gun comprising a gas inlet...

Ion implantation device and a method of semiconductor manufacturing...

Ion implantation with molecular ions containing phosphorus and arsenic

System and method for the manufacture of semiconductor devices by t...

External cathode ion source

Ion beam apparatus and method employing magnetic scanning

Ion implantation device and a method of semiconductor manufacturing...

Method and apparatus for extracting ions from an ion source for use...

Multi mode ion source

Ion implantation ion source, system and method

Ion beam apparatus and method for ion implantation

System and method for the manufacture of semiconductor devices by t...

Ion implantation device and a method of semiconductor manufacturing...

Method of manufacturing CMOS devices by the implantation of N- and...

Ion implantation device and a method of semiconductor manufacturing...

Method and system for extracting ion beams composed of molecular io...

Cluster ion implantation for defect engineering

Ion beam apparatus and method employing magnetic scanning

External cathode ion source

Dual mode ion source for ion implantation

Dual mode ion source for ion implantation

Method and apparatus for extending equipment uptime in ion implanta...

Dual mode ion source for ion implantation

Method and apparatus for extracting ions from an ion source for use...

Ion implantation ion source, system and method

Controlling the flow of vapors sublimated from solids

System and method for the manufacture of semiconductor devices by t...

Method and apparatus for extending equipment uptime in ion implanta...

Ion implantation system and control method

Patents Applicationslast 30 patents

Plasma Generator With at Least One Non-Metallic Component

Ion Source

ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING...

GAS FLOW SYSTEM, DEVICE AND METHOD

Gas flow device

ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING...

VAPORIZER

SYSTEM AND METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY T...

ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING...

ION BEAM APPARATUS AND METHOD EMPLOYING MAGNETIC SCANNING

EXTERNAL CATHODE ION SOURCE

ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD

Method and apparatus for extracting ions from an ion source for use...

SYSTEM AND METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY T...

MULTI MODE ION SOURCE

ION BEAM APPARATUS AND METHOD EMPLOYING MAGNETIC SCANNING

VAPOR DELIVERY SYSTEM USEFUL WITH ION SOURCES AND VAPORIZERS FOR US...

ION BEAM APPARATUS AND METHOD FOR ION IMPLANTATION

ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING...

EXTERNAL CATHODE ION SOURCE

ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING...

CLUSTER ION IMPLANTATION FOR DEFECT ENGINEERING

METHOD AND SYSTEM FOR EXTRACTING ION BEAMS COMPOSED OF MOLECULAR IO...

METHOD AND APPARATUS FOR EXTENDING EQUIPMENT UPTIME IN ION IMPLANTA...

Method and apparatus for extending equipment uptime in ion implanta...

Ion Implantation Device and a Method of Semiconductor Manufacturing...

DUAL MODE ION SOURCE FOR ION IMPLANTATION

Controlling the flow of vapors sublimated from solids

Controlling The Flow Of Vapors Sublimated From Solids

Dual mode ion source for ion implantation