Thomas NIEDERHAUSEN

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for localizing assembly errors
- Patent number 11,175,595
- Issue date Nov 16, 2021
- Carl Zeiss SMT GmbH
- Thomas Niederhausen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Testing device for an EUV optical system
- Patent number 9,857,269
- Issue date Jan 2, 2018
- Carl Zeiss SMT GmbH
- Alexander Huebel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR QUALIFYING A MASK FOR USE IN LITHOGRAPHY
- Publication number 20240085779
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Renzo Capelli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR LOCALIZING ASSEMBLY ERRORS
- Publication number 20200012197
- Publication date Jan 9, 2020
- Carl Zeiss SMT GMBH
- Thomas Niederhausen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TESTING DEVICE FOR AN EUV OPTICAL SYSTEM
- Publication number 20160282221
- Publication date Sep 29, 2016
- Carl Zeiss SMT GMBH
- Alexander HUEBEL
- G01 - MEASURING TESTING