Thomas Passegger

Follow

Person

Klagenfurt, AT

People

Patents Grantslast 30 patents

Information Patent Grant
Slit nozzle
- Patent number 9,597,703
- Issue date Mar 21, 2017
- Lam Research AG
- Stefan Detterbeck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for liquid treating disc-like articles
- Patent number 8,147,618
- Issue date Apr 3, 2012
- Lam Research AG
- Thomas Passegger
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE
- Publication number 20240304489
- Publication date Sep 12, 2024
- LAM RESEARCH AG
- Burkhart SCHIER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLIT NOZZLE
- Publication number 20160236227
- Publication date Aug 18, 2016
- LAM RESEARCH AG
- Stefan DETTERBECK
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Device and Method for Liquid Treating Disc-Like Articles
- Publication number 20090000645
- Publication date Jan 1, 2009
- SEZ AG
- Thomas Passegger
- H01 - BASIC ELECTRIC ELEMENTS