Thomas Patrick Duffey

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Radiation source testing
- Patent number 12,169,363
- Issue date Dec 17, 2024
- Cymer, LLC
- Russell Allen Burdt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of and apparatus for extending electrode life in a laser cha...
- Patent number 11,777,271
- Issue date Oct 3, 2023
- Cymer, LLC
- Thomas Patrick Duffey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spectral feature selection and pulse timing control of a pulsed lig...
- Patent number 11,768,438
- Issue date Sep 26, 2023
- Cymer, LLC
- Kevin Michael O'Brien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reducing speckle in an excimer light source
- Patent number 11,686,951
- Issue date Jun 27, 2023
- Cymer, LLC
- Wilhelmus Patrick Elisabeth Maria op 't Root
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spectral feature selection and pulse timing control of a pulsed lig...
- Patent number 11,526,083
- Issue date Dec 13, 2022
- Cymer, LLC
- Kevin Michael O'Brien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reducing speckle in an excimer light source
- Patent number 11,054,665
- Issue date Jul 6, 2021
- Cymer, LLC
- Wilhelmus Patrick Elisabeth Maria op 't Root
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for and method of sensing fluorine concentration
- Patent number 10,852,227
- Issue date Dec 1, 2020
- Cymer, LLC
- Thomas Patrick Duffey
- G01 - MEASURING TESTING
Information Patent Grant
Lithography optics adjustment and monitoring
- Patent number 10,845,711
- Issue date Nov 24, 2020
- Cymer, LLC
- Thomas Frederick Allen Bibby
- G01 - MEASURING TESTING
Information Patent Grant
Reducing speckle in an excimer light source
- Patent number 10,451,890
- Issue date Oct 22, 2019
- Cymer, LLC
- Wilhelmus Patrick Elisabeth Maria op 't Root
- G01 - MEASURING TESTING
Information Patent Grant
Lithography optics adjustment and monitoring
- Patent number 10,345,714
- Issue date Jul 9, 2019
- Cymer, LLC
- Thomas Frederick Allen Bibby
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Homogenization of light beam for spectral feature metrology
- Patent number 10,288,484
- Issue date May 14, 2019
- Cymer, LLC
- Zhongquan Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adjusting an amount of coherence of a light beam
- Patent number 10,267,687
- Issue date Apr 23, 2019
- Cymer, LLC
- Thomas Frederick Allen Bibby
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for and method of sensing fluorine concentration
- Patent number 10,228,322
- Issue date Mar 12, 2019
- Cymer LLC
- Thomas Patrick Duffey
- G01 - MEASURING TESTING
Information Patent Grant
Wavelength control system for pulse-by-pulse wavelength target trac...
- Patent number 10,096,967
- Issue date Oct 9, 2018
- Cymer, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Erosion resistant electrodes for use in generating gas discharge laser
- Patent number 10,074,953
- Issue date Sep 11, 2018
- Cymer, LLC
- Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Homogenization of light beam for spectral feature metrology
- Patent number 10,012,544
- Issue date Jul 3, 2018
- Cymer, LLC
- Zhongquan Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adjusting an amount of coherence of a light beam
- Patent number 9,945,730
- Issue date Apr 17, 2018
- Cymer, LLC
- Thomas Frederick Allen Bibby
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Estimation of spectral feature of pulsed light beam
- Patent number 9,599,510
- Issue date Mar 21, 2017
- Cymer, LLC
- Thomas P. Duffey
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Corrosion resistant electrodes for laser chambers
- Patent number 9,246,298
- Issue date Jan 26, 2016
- Cymer, LLC
- Janine Kardokus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Very high power laser chamber optical improvements
- Patent number 8,982,922
- Issue date Mar 17, 2015
- Cymer, LLC
- Hong Ye
- G02 - OPTICS
Information Patent Grant
Very high power laser chamber optical improvements
- Patent number 8,284,815
- Issue date Oct 9, 2012
- Cymer, Inc.
- Hong Ye
- G02 - OPTICS
Information Patent Grant
Gas discharge laser chamber
- Patent number 7,995,637
- Issue date Aug 9, 2011
- Cymer, Inc.
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathodes for fluorine gas discharge lasers
- Patent number 7,535,948
- Issue date May 19, 2009
- Cymer, Inc.
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Halogen gas discharge laser electrodes
- Patent number 7,301,980
- Issue date Nov 27, 2007
- Cymer, Inc.
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Four KHz gas discharge laser
- Patent number 6,757,316
- Issue date Jun 29, 2004
- Cymer, Inc.
- Peter C. Newman
- G01 - MEASURING TESTING
Information Patent Grant
Reliable, modular, production quality narrow-band high rep rate F2...
- Patent number RE38054
- Issue date Apr 1, 2003
- Cymer, Inc.
- Thomas Hofmann
- 372 - Coherent light generators
Information Patent Grant
Injection seeded F2 lithography laser
- Patent number 6,370,174
- Issue date Apr 9, 2002
- Cymer, Inc.
- Eckehard D. Onkels
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
F2 laser with visible red and IR control
- Patent number 6,330,260
- Issue date Dec 11, 2001
- Cymer, Inc.
- Eckehard D. Onkels
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reliable, modular, production quality narrow-band high rep rate ArF...
- Patent number 6,330,261
- Issue date Dec 11, 2001
- Cymer, Inc.
- Toshihiko Ishihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluorine control system with fluorine monitor
- Patent number 6,240,117
- Issue date May 29, 2001
- Cymer, Inc.
- Mengxiong Gong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SPECTRAL FEATURE SELECTION AND PULSE TIMING CONTROL OF A PULSED LIG...
- Publication number 20230040812
- Publication date Feb 9, 2023
- CYMER, LLC
- Kevin Michael O'Brien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL PULSED POWER SYSTEM WITH INDEPENDENT VOLTAGE AND TIMING CONTRO...
- Publication number 20230017337
- Publication date Jan 19, 2023
- CYMER, LLC
- Paul Christopher Melcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIATION SOURCE TESTING
- Publication number 20220404717
- Publication date Dec 22, 2022
- CYMER, LLC
- Russell Allen Burdt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR AND METHOD OF GENERATING MULTIPLE LASER BEAMS
- Publication number 20220255288
- Publication date Aug 11, 2022
- CYMER, LLC
- Walter Dale Gillespie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORS
- Publication number 20220255286
- Publication date Aug 11, 2022
- CYMER, LLC
- Yingbo Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REDUCING SPECKLE IN AN EXCIMER LIGHT SOURCE
- Publication number 20210239998
- Publication date Aug 5, 2021
- CYMER, LLC
- Wilhelmus Patrick Elisabeth Maria op `t Root
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF AND APPARATUS FOR EXTENDING ELECTRODE LIFE IN A LASER CHA...
- Publication number 20210111529
- Publication date Apr 15, 2021
- CYMER, LLC
- Thomas Patrick Duffey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECTRAL FEATURE SELECTION AND PULSE TIMING CONTROL OF A PULSED LIG...
- Publication number 20210018846
- Publication date Jan 21, 2021
- CYMER, LLC
- Kevin Michael O'Brien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCING SPECKLE IN AN EXCIMER LIGHT SOURCE
- Publication number 20190324286
- Publication date Oct 24, 2019
- CYMER, LLC
- Wilhelmus Patrick Elisabeth Maria op `t Root
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY OPTICS ADJUSTMENT AND MONITORING
- Publication number 20190310558
- Publication date Oct 10, 2019
- CYMER, LLC
- Thomas Frederick Allen Bibby
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR AND METHOD OF SENSING FLUORINE CONCENTRATION
- Publication number 20190170635
- Publication date Jun 6, 2019
- CYMER, LLC
- Thomas Patrick Duffey
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR AND METHOD OF SENSING FLUORINE CONCENTRATION
- Publication number 20190017924
- Publication date Jan 17, 2019
- CYMER, LLC
- Thomas Patrick Duffey
- G01 - MEASURING TESTING
Information Patent Application
HOMOGENIZATION OF LIGHT BEAM FOR SPECTRAL FEATURE METROLOGY
- Publication number 20180292264
- Publication date Oct 11, 2018
- CYMER, LLC
- Zhongquan Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REDUCING SPECKLE IN AN EXCIMER LIGHT SOURCE
- Publication number 20180203248
- Publication date Jul 19, 2018
- CYMER, LLC
- Wilhelmus Patrick Elisabeth Maria op `t Root
- G02 - OPTICS
Information Patent Application
ADJUSTING AN AMOUNT OF COHERENCE OF A LIGHT BEAM
- Publication number 20180180487
- Publication date Jun 28, 2018
- CYMER, LLC
- Thomas Frederick Allen Bibby
- G02 - OPTICS
Information Patent Application
WAVELENGTH CONTROL SYSTEM FOR PULSE-BY-PULSE WAVELENGTH TARGET TRAC...
- Publication number 20180159297
- Publication date Jun 7, 2018
- CYMER, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOMOGENIZATION OF LIGHT BEAM FOR SPECTRAL FEATURE METROLOGY
- Publication number 20180149523
- Publication date May 31, 2018
- CYMER, LLC
- Zhongquan Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTING AN AMOUNT OF COHERENCE OF A LIGHT BEAM
- Publication number 20180066995
- Publication date Mar 8, 2018
- CYMER, LLC
- Thomas Frederick Allen Bibby
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY OPTICS ADJUSTMENT AND MONITORING
- Publication number 20180017878
- Publication date Jan 18, 2018
- CYMER, LLC
- Thomas Frederick Allen Bibby
- G01 - MEASURING TESTING
Information Patent Application
EROSION RESISTANT ELECTRODES FOR USE IN GENERATING GAS DISCHARGE LASER
- Publication number 20170093112
- Publication date Mar 30, 2017
- Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Corrosion Resistant Electrodes for Laser Chambers
- Publication number 20160126689
- Publication date May 5, 2016
- CYMER, LLC
- Janine Kardokus
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Estimation of Spectral Feature of Pulsed Light Beam
- Publication number 20150355025
- Publication date Dec 10, 2015
- Cymer, LLC
- Thomas P. Duffey
- G01 - MEASURING TESTING
Information Patent Application
CORROSION RESISTANT ELECTRODES FOR LASER CHAMBERS
- Publication number 20130329763
- Publication date Dec 12, 2013
- Cymer, Inc.
- Janine Kardokus
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
VERY HIGH POWER LASER CHAMBER OPTICAL IMPROVEMENTS
- Publication number 20120307858
- Publication date Dec 6, 2012
- Hong Ye
- G02 - OPTICS
Information Patent Application
GAS DISCHARGE LASER CHAMBER
- Publication number 20100142582
- Publication date Jun 10, 2010
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERY HIGH POWER LASER CHAMBER OPTICAL IMPROVEMENTS
- Publication number 20100098120
- Publication date Apr 22, 2010
- Hong Ye
- G02 - OPTICS
Information Patent Application
Cathodes for fluorine gas discharge lasers
- Publication number 20060274809
- Publication date Dec 7, 2006
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Halogen gas discharge laser electrodes
- Publication number 20050047471
- Publication date Mar 3, 2005
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cathodes for fluorine gas discharge lasers
- Publication number 20040066827
- Publication date Apr 8, 2004
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Four KHz gas discharge laser
- Publication number 20020021728
- Publication date Feb 21, 2002
- Peter C. Newman
- G01 - MEASURING TESTING

Thomas Patrick Duffey

Person

Patents Grantslast 30 patents

Radiation source testing

Method of and apparatus for extending electrode life in a laser cha...

Spectral feature selection and pulse timing control of a pulsed lig...

Reducing speckle in an excimer light source

Spectral feature selection and pulse timing control of a pulsed lig...

Reducing speckle in an excimer light source

Apparatus for and method of sensing fluorine concentration

Lithography optics adjustment and monitoring

Reducing speckle in an excimer light source

Lithography optics adjustment and monitoring

Homogenization of light beam for spectral feature metrology

Adjusting an amount of coherence of a light beam

Apparatus for and method of sensing fluorine concentration

Wavelength control system for pulse-by-pulse wavelength target trac...

Erosion resistant electrodes for use in generating gas discharge laser

Homogenization of light beam for spectral feature metrology

Adjusting an amount of coherence of a light beam

Estimation of spectral feature of pulsed light beam

Corrosion resistant electrodes for laser chambers

Very high power laser chamber optical improvements

Very high power laser chamber optical improvements

Gas discharge laser chamber

Cathodes for fluorine gas discharge lasers

Halogen gas discharge laser electrodes

Four KHz gas discharge laser

Reliable, modular, production quality narrow-band high rep rate F2...

Injection seeded F2 lithography laser

F2 laser with visible red and IR control

Reliable, modular, production quality narrow-band high rep rate ArF...

Fluorine control system with fluorine monitor

Patents Applicationslast 30 patents

SPECTRAL FEATURE SELECTION AND PULSE TIMING CONTROL OF A PULSED LIG...

DUAL PULSED POWER SYSTEM WITH INDEPENDENT VOLTAGE AND TIMING CONTRO...

RADIATION SOURCE TESTING

APPARATUS FOR AND METHOD OF GENERATING MULTIPLE LASER BEAMS

CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORS

REDUCING SPECKLE IN AN EXCIMER LIGHT SOURCE

METHOD OF AND APPARATUS FOR EXTENDING ELECTRODE LIFE IN A LASER CHA...

SPECTRAL FEATURE SELECTION AND PULSE TIMING CONTROL OF A PULSED LIG...

REDUCING SPECKLE IN AN EXCIMER LIGHT SOURCE

LITHOGRAPHY OPTICS ADJUSTMENT AND MONITORING

APPARATUS FOR AND METHOD OF SENSING FLUORINE CONCENTRATION

APPARATUS FOR AND METHOD OF SENSING FLUORINE CONCENTRATION

HOMOGENIZATION OF LIGHT BEAM FOR SPECTRAL FEATURE METROLOGY

REDUCING SPECKLE IN AN EXCIMER LIGHT SOURCE

ADJUSTING AN AMOUNT OF COHERENCE OF A LIGHT BEAM

WAVELENGTH CONTROL SYSTEM FOR PULSE-BY-PULSE WAVELENGTH TARGET TRAC...

HOMOGENIZATION OF LIGHT BEAM FOR SPECTRAL FEATURE METROLOGY

ADJUSTING AN AMOUNT OF COHERENCE OF A LIGHT BEAM

LITHOGRAPHY OPTICS ADJUSTMENT AND MONITORING

EROSION RESISTANT ELECTRODES FOR USE IN GENERATING GAS DISCHARGE LASER

Corrosion Resistant Electrodes for Laser Chambers

Estimation of Spectral Feature of Pulsed Light Beam

CORROSION RESISTANT ELECTRODES FOR LASER CHAMBERS

VERY HIGH POWER LASER CHAMBER OPTICAL IMPROVEMENTS

GAS DISCHARGE LASER CHAMBER

VERY HIGH POWER LASER CHAMBER OPTICAL IMPROVEMENTS

Cathodes for fluorine gas discharge lasers

Halogen gas discharge laser electrodes

Cathodes for fluorine gas discharge lasers

Four KHz gas discharge laser