Thomas Petasch

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Optical element, optical assembly and production method
- Patent number 10,520,826
- Issue date Dec 31, 2019
- Carl Zeiss SMT GmbH
- Roland Pilz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element, optical assembly and production method
- Patent number 10,175,582
- Issue date Jan 8, 2019
- Carl Zeiss SMT GmbH
- Roland Pilz
- G02 - OPTICS
Information Patent Grant
Lithographic projection objective
- Patent number 10,042,265
- Issue date Aug 7, 2018
- Carl Zeiss SMT GmbH
- Olaf Rogalsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical projection system
- Patent number 9,891,535
- Issue date Feb 13, 2018
- Carl Zeiss SMT GmbH
- Johannes Rau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical projection system
- Patent number 9,557,653
- Issue date Jan 31, 2017
- Carl Zeiss SMT GmbH
- Johannes Rau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic projection objective
- Patent number 9,494,868
- Issue date Nov 15, 2016
- Carl Zeiss SMT GmbH
- Olaf Rogalsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical projection system
- Patent number 9,104,016
- Issue date Aug 11, 2015
- Carl Zeiss SMT GmbH
- Johannes Rau
- G02 - OPTICS
Information Patent Grant
Lithographic projection objective
- Patent number 8,605,253
- Issue date Dec 10, 2013
- Carl Zeiss SMT GmbH
- Olaf Rogalsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for the low-deformation replaceable mounting of an optical e...
- Patent number 8,582,081
- Issue date Nov 12, 2013
- Carl Zeiss SMT GmbH
- Franz Sorg
- G02 - OPTICS
Information Patent Grant
Optical projection system
- Patent number 8,300,210
- Issue date Oct 30, 2012
- Carl Zeiss SMT GmbH
- Johannes Rau
- G02 - OPTICS
Information Patent Grant
Apparatus for mounting two or more elements and method for processi...
- Patent number 7,800,849
- Issue date Sep 21, 2010
- Carl Zeiss SMT AG
- Hubert Holderer
- G01 - MEASURING TESTING
Information Patent Grant
Adjustment arrangement of an optical element
- Patent number 7,656,595
- Issue date Feb 2, 2010
- Carl Zeiss SMT AG
- Klaus Beck
- G02 - OPTICS
Information Patent Grant
Device for the low-deformation replaceable mounting of an optical e...
- Patent number 7,471,469
- Issue date Dec 30, 2008
- Carl Zeiss SMT AG
- Franz Sorg
- G02 - OPTICS
Information Patent Grant
Adjustment arrangement of an optical element
- Patent number 7,457,059
- Issue date Nov 25, 2008
- Carl Zeiss SMT AG
- Klaus Beck
- G02 - OPTICS
Information Patent Grant
Optical element with an optical axis
- Patent number 7,295,331
- Issue date Nov 13, 2007
- Carl Zeiss SMT AG
- Thomas Petasch
- G02 - OPTICS
Information Patent Grant
Adjustment arrangement of an optical element
- Patent number 7,193,794
- Issue date Mar 20, 2007
- Carl Zeiss SMT AG
- Klaus Beck
- G02 - OPTICS
Information Patent Grant
Adjusting apparatus for devices and for setting adjustments
- Patent number 7,082,693
- Issue date Aug 1, 2006
- Carl Zeiss SMT AG
- Klaus-Dieter Klein
- G02 - OPTICS
Information Patent Grant
Lens system, in particular a projection lens system for semiconduct...
- Patent number 7,061,698
- Issue date Jun 13, 2006
- Carl Zeiss SMT AG
- Karlfrid Osterried
- G02 - OPTICS
Information Patent Grant
Apparatus for mounting an optical element in an optical system
- Patent number 6,870,632
- Issue date Mar 22, 2005
- Carl Zeiss SMT AG
- Thomas Petasch
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
DEVICE FOR CLEANING A SURFACE IN THE INTERIOR OF AN OPTICAL SYSTEM
- Publication number 20220308466
- Publication date Sep 29, 2022
- Carl Zeiss SMT GMBH
- Jovana-Maria DIESCH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT, OPTICAL ASSEMBLY AND PRODUCTION METHOD
- Publication number 20190121240
- Publication date Apr 25, 2019
- Carl Zeiss SMT GMBH
- Roland Pilz
- G02 - OPTICS
Information Patent Application
LITHOGRAPHIC PROJECTION OBJECTIVE
- Publication number 20190025709
- Publication date Jan 24, 2019
- Carl Zeiss SMT GMBH
- Olaf Rogalsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical Projection System
- Publication number 20180259856
- Publication date Sep 13, 2018
- Carl Zeiss SMT GMBH
- Johannes Rau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT, OPTICAL ASSEMBLY AND PRODUCTION METHOD
- Publication number 20170261860
- Publication date Sep 14, 2017
- Carl Zeiss SMT GMBH
- Roland Pilz
- G02 - OPTICS
Information Patent Application
Optical Projection System
- Publication number 20170219929
- Publication date Aug 3, 2017
- Carl Zeiss SMT GMBH
- Johannes Rau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC PROJECTION OBJECTIVE
- Publication number 20170031247
- Publication date Feb 2, 2017
- Carl Zeiss SMT GMBH
- Olaf Rogalsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL PROJECTION SYSTEM
- Publication number 20150323873
- Publication date Nov 12, 2015
- Carl Zeiss SMT GMBH
- Johannes Rau
- G02 - OPTICS
Information Patent Application
LITHOGRAPHIC PROJECTION OBJECTIVE
- Publication number 20140078482
- Publication date Mar 20, 2014
- Carl Zeiss SMT GMBH
- Olaf Rogalsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE FOR THE LOW-DEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL E...
- Publication number 20140063628
- Publication date Mar 6, 2014
- Carl Zeiss SMT GMBH
- Franz Sorg
- G02 - OPTICS
Information Patent Application
OPTICAL PROJECTION SYSTEM
- Publication number 20130044304
- Publication date Feb 21, 2013
- Carl Zeiss SMT GMBH
- Johannes Rau
- G02 - OPTICS
Information Patent Application
Optical Projection System
- Publication number 20090174874
- Publication date Jul 9, 2009
- Johannes Rau
- G02 - OPTICS
Information Patent Application
LITHOGRAPHIC PROJECTION OBJECTIVE
- Publication number 20090153829
- Publication date Jun 18, 2009
- Carl Zeiss SMT AG
- Olaf Rogalsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE FOR THE LOW-DEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL E...
- Publication number 20090122288
- Publication date May 14, 2009
- Carl Zeiss SMT AG
- Franz Sorg
- G02 - OPTICS
Information Patent Application
APPARATUS FOR MOUNTING TWO OR MORE ELEMENTS AND METHOD FOR PROCESSI...
- Publication number 20090015947
- Publication date Jan 15, 2009
- Hubert Holderer
- G01 - MEASURING TESTING
Information Patent Application
Adjustment Arrangement of an Optical Element
- Publication number 20090009892
- Publication date Jan 8, 2009
- Carl Zeiss SMT AG
- Klaus Beck
- G02 - OPTICS
Information Patent Application
ADJUSTMENT ARRANGEMENT OF AN OPTICAL ELEMENT
- Publication number 20070014038
- Publication date Jan 18, 2007
- Klaus Beck
- G02 - OPTICS
Information Patent Application
Device for the low-deformation replaceable mounting of an optical e...
- Publication number 20060158749
- Publication date Jul 20, 2006
- Franz Sorg
- G02 - OPTICS
Information Patent Application
Optical element with an optical axis
- Publication number 20040257683
- Publication date Dec 23, 2004
- Thomas Petasch
- G02 - OPTICS
Information Patent Application
Adjustment arrangement of an optical element
- Publication number 20040174619
- Publication date Sep 9, 2004
- Carl Zeiss SMT AG
- Klaus Beck
- G02 - OPTICS
Information Patent Application
Optical system
- Publication number 20020186479
- Publication date Dec 12, 2002
- Armin Schoppach
- G02 - OPTICS
Information Patent Application
Apparatus for mounting an optical element in an optical system
- Publication number 20020176094
- Publication date Nov 28, 2002
- Thomas Petasch
- G02 - OPTICS
Information Patent Application
Lens system, in particular a projection lens system for semiconduct...
- Publication number 20020167740
- Publication date Nov 14, 2002
- Karlfrid Osterried
- G02 - OPTICS
Information Patent Application
Adjusting apparatus for devices and for setting adjustments
- Publication number 20020152627
- Publication date Oct 24, 2002
- Klaus-Dieter Klein
- G02 - OPTICS

Thomas Petasch

Person

Patents Grantslast 30 patents

Optical element, optical assembly and production method

Optical element, optical assembly and production method

Lithographic projection objective

Optical projection system

Optical projection system

Lithographic projection objective

Optical projection system

Lithographic projection objective

Device for the low-deformation replaceable mounting of an optical e...

Optical projection system

Apparatus for mounting two or more elements and method for processi...

Adjustment arrangement of an optical element

Device for the low-deformation replaceable mounting of an optical e...

Adjustment arrangement of an optical element

Optical element with an optical axis

Adjustment arrangement of an optical element

Adjusting apparatus for devices and for setting adjustments

Lens system, in particular a projection lens system for semiconduct...

Apparatus for mounting an optical element in an optical system

Patents Applicationslast 30 patents

DEVICE FOR CLEANING A SURFACE IN THE INTERIOR OF AN OPTICAL SYSTEM

OPTICAL ELEMENT, OPTICAL ASSEMBLY AND PRODUCTION METHOD

LITHOGRAPHIC PROJECTION OBJECTIVE

Optical Projection System

OPTICAL ELEMENT, OPTICAL ASSEMBLY AND PRODUCTION METHOD

Optical Projection System

LITHOGRAPHIC PROJECTION OBJECTIVE

OPTICAL PROJECTION SYSTEM

LITHOGRAPHIC PROJECTION OBJECTIVE

DEVICE FOR THE LOW-DEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL E...

OPTICAL PROJECTION SYSTEM

Optical Projection System

LITHOGRAPHIC PROJECTION OBJECTIVE

DEVICE FOR THE LOW-DEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL E...

APPARATUS FOR MOUNTING TWO OR MORE ELEMENTS AND METHOD FOR PROCESSI...

Adjustment Arrangement of an Optical Element

ADJUSTMENT ARRANGEMENT OF AN OPTICAL ELEMENT

Device for the low-deformation replaceable mounting of an optical e...

Optical element with an optical axis

Adjustment arrangement of an optical element

Optical system

Apparatus for mounting an optical element in an optical system

Lens system, in particular a projection lens system for semiconduct...

Adjusting apparatus for devices and for setting adjustments