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Thomas Plettner
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San Ramon, CA, US
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last 30 patents
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Patent Grant
Electron emitter device with integrated multi-pole electrode structure
Patent number
9,793,089
Issue date
Oct 17, 2017
KLA-Tencor Corporation
Thomas Plettner
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Non-invasive charged particle beam monitor
Patent number
9,390,887
Issue date
Jul 12, 2016
KLA-Tencor Corporation
Thomas Plettner
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ELECTRON EMITTER DEVICE WITH INTEGRATED MULTI-POLE ELECTRODE STRUCTURE
Publication number
20150076988
Publication date
Mar 19, 2015
KLA-Tencor Corporation
Thomas Plettner
B82 - NANO-TECHNOLOGY
Information
Patent Application
NON-INVASIVE CHARGED PARTICLE BEAM MONITOR
Publication number
20150076350
Publication date
Mar 19, 2015
KLA-Tencor Corporation
Thomas Plettner
H01 - BASIC ELECTRIC ELEMENTS