Thomas R. Harry

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Trenton, NJ, US

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Patents Grantslast 30 patents

Information Patent Grant
Active neural network control of wafer attributes in a plasma etch...
- Patent number 5,737,496
- Issue date Apr 7, 1998
- Lucent Technologies Inc.
- Robert Charles Frye
- G05 - CONTROLLING REGULATING
Information Patent Grant
Active neural network control of wafer attributes in a plasma etch...
- Patent number 5,467,883
- Issue date Nov 21, 1995
- AT&T Corp.
- Robert C. Frye
- G05 - CONTROLLING REGULATING