Thomas Rettenmaier

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Aalen-Dewangen, DE

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Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR PROVIDING SENSOR DATA OF AN OPTICAL SYSTEM...
- Publication number 20250164893
- Publication date May 22, 2025
- Carl Zeiss SMT GMBH
- Steffen VAAS
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
TEMPERATURE MEASURING DEVICE, LITHOGRAPHY APPARATUS AND METHOD FOR...
- Publication number 20240159600
- Publication date May 16, 2024
- Carl Zeiss SMT GMBH
- Lars Berger
- G01 - MEASURING TESTING