Thomas RUBIO

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning assemblies for substrate processing chambers
- Patent number 12,012,653
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Yuxing Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
- Patent number 11,952,663
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolator apparatus and methods for substrate processing chambers
- Patent number 11,827,980
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
- Patent number 11,643,725
- Issue date May 9, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolator apparatus and methods for substrate processing chambers
- Patent number 11,492,705
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CLEANING ASSEMBLIES FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20240368756
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Yuxing ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...
- Publication number 20230392259
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20230047451
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- Nitin PATHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING ASSEMBLIES FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20220307129
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Yuxing Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...
- Publication number 20220307135
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20210002763
- Publication date Jan 7, 2021
- Applied Materials, Inc.
- Nitin PATHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Thomas RUBIO

Person

Patents Grantslast 30 patents

Cleaning assemblies for substrate processing chambers

Hardware to prevent bottom purge incursion in application volume an...

Isolator apparatus and methods for substrate processing chambers

Hardware to prevent bottom purge incursion in application volume an...

Isolator apparatus and methods for substrate processing chambers

Patents Applicationslast 30 patents

CLEANING ASSEMBLIES FOR SUBSTRATE PROCESSING CHAMBERS

HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...

ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS

CLEANING ASSEMBLIES FOR SUBSTRATE PROCESSING CHAMBERS

HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...

ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS