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Thomas Schafbauer
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Ottobrunn, DE
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last 30 patents
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Patent Grant
Structure and method for placement, sizing and shaping of dummy str...
Patent number
8,921,166
Issue date
Dec 30, 2014
Infineon Technologies AG
Sebastian Schmidt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structure and method for placement, sizing and shaping of dummy str...
Patent number
7,868,427
Issue date
Jan 11, 2011
Infineon Technologies AG
Sebastian Schmidt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus for processing a substrate wafer and method for operating...
Patent number
5,998,767
Issue date
Dec 7, 1999
Siemens Aktiengesellschaft
Alfred Kersch
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Structure and Method for Placement, Sizing and Shaping of Dummy Str...
Publication number
20130267048
Publication date
Oct 10, 2013
Sebastian Schmidt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Structure and Method for Placement, Sizing and Shaping of Dummy Str...
Publication number
20110133304
Publication date
Jun 9, 2011
INFINEON TECHNOLOGIES AG
Sebastian Schmidt
B81 - MICRO-STRUCTURAL TECHNOLOGY