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Thomas Scherübl
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Jena, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for EUV mask blank buried defect analysis
Patent number
10,055,833
Issue date
Aug 21, 2018
Carl Zeiss SMT GmbH
Jan Hendrik Peters
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining the performance of a photolithographic mask
Patent number
9,431,212
Issue date
Aug 30, 2016
Carl Zeiss SMS GmbH
Markus Waiblinger
G01 - MEASURING TESTING
Information
Patent Grant
Method for emulation of a photolithographic process and mask inspec...
Patent number
8,913,120
Issue date
Dec 16, 2014
Carl Zeiss SMS GmbH
Eric Poortinga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Verification method for repairs on photolithography masks
Patent number
8,515,154
Issue date
Aug 20, 2013
Carl Zeiss SMS GmbH
Thomas Scherübl
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Method and System for EUV Mask Blank Buried Defect Analysis
Publication number
20160169816
Publication date
Jun 16, 2016
Carl Zeiss SMT GMBH
Jan Hendrik Peters
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR DETERMINING THE PERFORMANCE OF A PHOTOLITHOGRAPHIC MASK
Publication number
20130126728
Publication date
May 23, 2013
CARL ZEISS SMS GMBH
Markus Waiblinger
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR EMULATION OF A PHOTOLITHOGRAPHIC PROCESS AND MASK INSPEC...
Publication number
20110090329
Publication date
Apr 21, 2011
Carl Zeiss SMS GmbH
Eric Poortinga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR MEASURING OF MASKS FOR THE PHOTO-LITHOGRAPHY
Publication number
20110016437
Publication date
Jan 20, 2011
Thomas Scherübl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VERIFICATION METHOD FOR REPAIRS ON PHOTOLITHOGRAPHY MASKS
Publication number
20100254591
Publication date
Oct 7, 2010
CARL ZEISS SMS GMBH
Thomas Scherübl
G01 - MEASURING TESTING
Information
Patent Application
Illuminating and imaging system comprising a diffractive beam splitter
Publication number
20070070502
Publication date
Mar 29, 2007
Robert Brunner
G02 - OPTICS