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Thomas Scheruebl
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Jena, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for analyzing an element of a photolithography...
Patent number
12,001,145
Issue date
Jun 4, 2024
Carl Zeiss SMT GmbH
Alexander Freytag
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for removing a particle from a mask system
Patent number
11,774,870
Issue date
Oct 3, 2023
Carl Zeiss SMT GmbH
Sergey Oshemkov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for detecting a structure of a lithography mask and device f...
Patent number
11,079,338
Issue date
Aug 3, 2021
Carl Zeiss SMT GmbH
Ulrich Matejka
G01 - MEASURING TESTING
Information
Patent Grant
Method for correcting the critical dimension uniformity of a photom...
Patent number
10,578,975
Issue date
Mar 3, 2020
Carl Zeiss SMT GmbH
Thomas Thaler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern inspection apparatus, pattern position measurement apparatu...
Patent number
10,572,990
Issue date
Feb 25, 2020
NuFlare Technology, Inc.
Shusuke Yoshitake
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for analyzing a photomask
Patent number
9,261,775
Issue date
Feb 16, 2016
Carl Zeiss SMS GmbH
Anthony Garetto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for measuring the relative local position error o...
Patent number
8,731,273
Issue date
May 20, 2014
Carl Zeiss SMS GmbH
Michael Arnz
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and apparatus for measuring of masks for the photo-lithography
Patent number
8,730,474
Issue date
May 20, 2014
Carl Zeiss SMS GmbH
Thomas Scheruebl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for analyzing masks for photolithography
Patent number
8,718,354
Issue date
May 6, 2014
Carl Zeiss SMS GmbH
Ulrich Stroessner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Microscope imaging system and method for emulating a high aperture...
Patent number
RE44216
Issue date
May 14, 2013
Carl Zeiss SMS GmbH
Michael Totzeck
359 - Optical: systems and elements
Information
Patent Grant
Method and apparatus for analyzing a group of photolithographic masks
Patent number
8,264,535
Issue date
Sep 11, 2012
Carl Zeiss SMS GmbH
Oliver Kienzle
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Arrangement for inspecting objects, especially masks in microlithog...
Patent number
7,525,115
Issue date
Apr 28, 2009
Carl Zeiss SMS GmbH
Hans-Juergen Dobschal
G01 - MEASURING TESTING
Information
Patent Grant
Microscope imaging system and method for emulating a high aperture...
Patent number
7,286,284
Issue date
Oct 23, 2007
Carl Zeiss SMS GmbH
Michael Totzeck
G02 - OPTICS
Information
Patent Grant
Imaging system for an extreme ultraviolet (EUV) beam-based microscope
Patent number
6,894,837
Issue date
May 17, 2005
Carl Zeiss Microelectric Systems GmbH
Hans-Juergen Dobschal
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Automatic focusing device for an optical appliance
Patent number
6,825,454
Issue date
Nov 30, 2004
Carl Zeiss Microelectronic Systems GmbH
Norbert Czarnetzki
G02 - OPTICS
Information
Patent Grant
Confocal microscopic device
Patent number
6,674,572
Issue date
Jan 6, 2004
Carl Zeiss Jena GmbH
Thomas Scheruebl
G01 - MEASURING TESTING
Information
Patent Grant
Microscope with light source
Patent number
6,307,690
Issue date
Oct 23, 2001
Carl Zeiss Jena GmbH
Norbert Czarnetzki
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR REMOVING A PARTICLE FROM A MASK SYSTEM
Publication number
20230053667
Publication date
Feb 23, 2023
Carl Zeiss SMT GMBH
Sergey Oshemkov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETECTING A STRUCTURE OF A LITHOGRAPHY MASK AND DEVICE F...
Publication number
20190391087
Publication date
Dec 26, 2019
Carl Zeiss SMT GMBH
Ulrich Matejka
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS AND METHOD FOR ANALYZING AN ELEMENT OF A PHOTOLITHOGRAPHY...
Publication number
20190354019
Publication date
Nov 21, 2019
Carl Zeiss SMT GMBH
Alexander Freytag
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for Correcting the Critical Dimension Uniformity of a Photom...
Publication number
20190107783
Publication date
Apr 11, 2019
Carl Zeiss SMT GMBH
Thomas Thaler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN INSPECTION APPARATUS, PATTERN POSITION MEASUREMENT APPARATU...
Publication number
20180293720
Publication date
Oct 11, 2018
NuFlare Technology, Inc.
Shusuke YOSHITAKE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR ANALYZING A PHOTOMASK
Publication number
20140254915
Publication date
Sep 11, 2014
Anthony Garetto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND DEVICE FOR MEASURING THE RELATIVE LOCAL POSITION ERROR O...
Publication number
20110229010
Publication date
Sep 22, 2011
CARL ZEISS SMS GMBH
Michael Arnz
B82 - NANO-TECHNOLOGY
Information
Patent Application
METHOD AND APPARATUS FOR ANALYZING A GROUP OF PHOTOLITHOGRAPHIC MASKS
Publication number
20100157046
Publication date
Jun 24, 2010
Oliver Kienzle
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Arrangement for inspecting objects, especially masks in microlithog...
Publication number
20060262306
Publication date
Nov 23, 2006
Hans-Juergen Dobschal
G01 - MEASURING TESTING
Information
Patent Application
Polarizer device for generating a defined spatial distribution of p...
Publication number
20060028706
Publication date
Feb 9, 2006
Carl Zeiss SMT AG
Michael Totzeck
G02 - OPTICS
Information
Patent Application
Microscope imaging system and method for emulating a high aperture...
Publication number
20060012873
Publication date
Jan 19, 2006
Michael Totzeck
G02 - OPTICS
Information
Patent Application
Imaging system for an extreme ultraviolet (EUV) beam-based microscope
Publication number
20040212891
Publication date
Oct 28, 2004
Hans-Juergen Dobschal
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
Automatic focussing device for an optical appliance
Publication number
20040129858
Publication date
Jul 8, 2004
Norbert Czarnetzki
G02 - OPTICS
Information
Patent Application
Microscope with and automatic focusing device
Publication number
20040021936
Publication date
Feb 5, 2004
Norbert Czarnetzki
G02 - OPTICS
Information
Patent Application
Autofocussing device for optical instruments
Publication number
20030164440
Publication date
Sep 4, 2003
Nobert Czarnetzki
G02 - OPTICS
Information
Patent Application
Arrangement for confocal autofocussing
Publication number
20030112504
Publication date
Jun 19, 2003
Norbert Czarnetzki
G02 - OPTICS