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Thomas Schicketanz
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Aalen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method and device for characterizing the surface shape of an optica...
Patent number
11,927,500
Issue date
Mar 12, 2024
Carl Zeiss SMT GmbH
Steffen Siegler
G01 - MEASURING TESTING
Information
Patent Grant
Method and device for characterizing the surface shape of an optica...
Patent number
11,326,872
Issue date
May 10, 2022
Carl Zeiss SMT GmbH
Steffen Siegler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection optical unit for EUV projection lithography
Patent number
10,545,323
Issue date
Jan 28, 2020
Carl Zeiss SMT GmbH
Markus Schwab
G02 - OPTICS
Information
Patent Grant
Optical system, in particular for a microlithographic projection ex...
Patent number
10,520,827
Issue date
Dec 31, 2019
Carl Zeiss SMT GmbH
Hartmut Enkisch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical element and optical arrangement therewith
Patent number
10,474,036
Issue date
Nov 12, 2019
Carl Zeiss SMT GmbH
Hans-Jochen Paul
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV mirror and optical system comprising EUV mirror
Patent number
10,203,435
Issue date
Feb 12, 2019
Carl Zeiss SMT GmbH
Thomas Schicketanz
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Catadioptric projection objective comprising deflection mirrors and...
Patent number
10,120,176
Issue date
Nov 6, 2018
Carl Zeiss SMT GmbH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
10,042,146
Issue date
Aug 7, 2018
Carl Zeiss SMT GmbH
Alexander Epple
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection lens for EUV microlithography, film element and method f...
Patent number
10,001,631
Issue date
Jun 19, 2018
Carl Zeiss SMT GmbH
Boris Bittner
G02 - OPTICS
Information
Patent Grant
EUV mirror and optical system comprising EUV mirror
Patent number
9,915,876
Issue date
Mar 13, 2018
Carl Zeiss SMT GmbH
Thomas Schicketanz
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Reflective optical element, and optical system of a microlithograph...
Patent number
9,915,873
Issue date
Mar 13, 2018
Carl Zeiss SMT GmbH
Hartmut Enkisch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Catadioptric projection objective comprising deflection mirrors and...
Patent number
9,817,220
Issue date
Nov 14, 2017
Carl Zeiss SMT GmbH
Thomas Schicketanz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Catadioptric projection objective
Patent number
9,726,870
Issue date
Aug 8, 2017
Carl Zeiss SMT GmbH
Alexander Epple
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging catoptric EUV projection optical unit
Patent number
9,639,005
Issue date
May 2, 2017
Carl Zeiss SMT GmbH
Johannes Ruoff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of lithographically transferring a pattern on a light sensit...
Patent number
9,581,910
Issue date
Feb 28, 2017
Carl Zeiss SMT GmbH
Frank Schlesener
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Catadioptric projection objective comprising deflection mirrors and...
Patent number
9,459,435
Issue date
Oct 4, 2016
Carl Zeiss SMT GmbH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Grant
Method for correcting the surface form of a mirror
Patent number
9,341,756
Issue date
May 17, 2016
Carl Zeiss SMT GmbH
Juergen Mueller
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Imaging optical unit and projection exposure apparatus for projecti...
Patent number
9,291,751
Issue date
Mar 22, 2016
Carl Zeiss SMT GmbH
Hans-Juergen Rostalski
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
9,279,969
Issue date
Mar 8, 2016
Carl Zeiss SMT GmbH
Alexander Epple
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective comprising deflection mirrors and...
Patent number
9,274,327
Issue date
Mar 1, 2016
Carl Zeiss SMT GmbH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Grant
Projection objective
Patent number
8,902,406
Issue date
Dec 2, 2014
Carl Zeiss SMT GmbH
Reinhold Walser
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective comprising deflection mirrors and...
Patent number
8,896,814
Issue date
Nov 25, 2014
Carl Zeiss SMT GmbH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
8,873,137
Issue date
Oct 28, 2014
Carl Zeiss SMT GmbH
Alexander Epple
G02 - OPTICS
Information
Patent Grant
Projection objective for a microlithographic EUV projection exposur...
Patent number
8,693,098
Issue date
Apr 8, 2014
Carl Zeiss SMT GmbH
Siegfried Rennon
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
8,446,665
Issue date
May 21, 2013
Carl Zeiss SMT GmbH
Alexander Epple
G02 - OPTICS
Information
Patent Grant
High transmission, high aperture catadioptric projection objective...
Patent number
8,345,222
Issue date
Jan 1, 2013
Carl Zeiss SMT GmbH
Daniel Kraehmer
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
PROCESS FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT FOR THE EXTREME...
Publication number
20230417961
Publication date
Dec 28, 2023
Carl Zeiss SMT GMBH
Thomas SCHICKETANZ
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND DEVICE FOR CHARACTERIZING THE SURFACE SHAPE OF AN OPTICA...
Publication number
20220236139
Publication date
Jul 28, 2022
Carl Zeiss SMT GMBH
Steffen SIEGLER
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND DEVICE FOR CHARACTERIZING THE SURFACE SHAPE OF AN OPTICA...
Publication number
20210140762
Publication date
May 13, 2021
Carl Zeiss SMT GMBH
Steffen SIEGLER
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL SYSTEM, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EX...
Publication number
20190212659
Publication date
Jul 11, 2019
Carl Zeiss SMT GMBH
Hartmut ENKISCH
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
PROJECTION OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY
Publication number
20190121107
Publication date
Apr 25, 2019
Carl Zeiss SMT GMBH
Markus Schwab
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE COMPRISING DEFLECTION MIRRORS AND...
Publication number
20190056576
Publication date
Feb 21, 2019
Carl Zeiss SMT GmbH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20180373006
Publication date
Dec 27, 2018
Carl Zeiss SMT GMBH
Alexander EPPLE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE COMPRISING DEFLECTION MIRRORS AND...
Publication number
20180095259
Publication date
Apr 5, 2018
Carl Zeiss SMT GMBH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20180095258
Publication date
Apr 5, 2018
Carl Zeiss SMT GMBH
Alexander EPPLE
G02 - OPTICS
Information
Patent Application
Projection Lens for EUV Microlithography, Film Element and Method f...
Publication number
20170261730
Publication date
Sep 14, 2017
Carl Zeiss SMT GMBH
Boris Bittner
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE COMPRISING DEFLECTION MIRRORS AND...
Publication number
20170052355
Publication date
Feb 23, 2017
Carl Zeiss SMT GMBH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Application
OPTICAL ELEMENT AND OPTICAL ARRANGEMENT THEREWITH
Publication number
20160377988
Publication date
Dec 29, 2016
Carl Zeiss SMT GMBH
Hans-Jochen PAUL
G02 - OPTICS
Information
Patent Application
EUV MIRROR AND OPTICAL SYSTEM COMPRISING EUV MIRROR
Publication number
20160327702
Publication date
Nov 10, 2016
Carl Zeiss SMT GMBH
Thomas SCHICKETANZ
G02 - OPTICS
Information
Patent Application
METHOD FOR CORRECTING THE SURFACE FORM OF A MIRROR
Publication number
20160299268
Publication date
Oct 13, 2016
Carl Zeiss SMT GMBH
Juergen MUELLER
G02 - OPTICS
Information
Patent Application
REFLECTIVE OPTICAL ELEMENT, AND OPTICAL SYSTEM OF A MICROLITHOGRAPH...
Publication number
20160266499
Publication date
Sep 15, 2016
Carl Zeiss SMT GMBH
Hartmut ENKISCH
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20160231546
Publication date
Aug 11, 2016
Carl Zeiss SMT GMBH
Alexander EPPLE
G02 - OPTICS
Information
Patent Application
EUV MIRROR AND OPTICAL SYSTEM COMPRISING EUV MIRROR
Publication number
20160195648
Publication date
Jul 7, 2016
Carl Zeiss SMT GMBH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE COMPRISING DEFLECTION MIRRORS AND...
Publication number
20160154228
Publication date
Jun 2, 2016
Carl Zeiss SMT GMBH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Application
METHOD OF LITHOGRAPHICALLY TRANSFERRING A PATTERN ON A LIGHT SENSIT...
Publication number
20150301455
Publication date
Oct 22, 2015
Carl Zeiss SMT GMBH
Frank Schlesener
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE COMPRISING DEFLECTION MIRRORS AND...
Publication number
20150062725
Publication date
Mar 5, 2015
Carl Zeiss SMT GmbH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20150055212
Publication date
Feb 26, 2015
Carl Zeiss SMT GMBH
Alexander EPPLE
G02 - OPTICS
Information
Patent Application
IMAGING OPTICAL UNIT AND PROJECTION EXPOSURE APPARATUS FOR PROJECTI...
Publication number
20140368801
Publication date
Dec 18, 2014
Hans-Juergen Rostalski
G02 - OPTICS
Information
Patent Application
Projection Lens for EUV Microlithography, Film Element and Method f...
Publication number
20140347721
Publication date
Nov 27, 2014
Boris Bittner
B82 - NANO-TECHNOLOGY
Information
Patent Application
IMAGING CATOPTRIC EUV PROJECTION OPTICAL UNIT
Publication number
20140176928
Publication date
Jun 26, 2014
Johannes Ruoff
G02 - OPTICS
Information
Patent Application
METHOD FOR CORRECTING THE SURFACE FORM OF A MIRROR
Publication number
20140078481
Publication date
Mar 20, 2014
Carl Zeiss SMT GMBH
Juergen MUELLER
B82 - NANO-TECHNOLOGY
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20130242279
Publication date
Sep 19, 2013
Carl Zeiss SMT GMBH
Alexander EPPLE
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE COMPRISING DEFLECTION MIRRORS AND...
Publication number
20120236277
Publication date
Sep 20, 2012
Carl Zeiss SMT GMBH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Application
PROJECTION OBJECTIVE
Publication number
20110141446
Publication date
Jun 16, 2011
Carl Zeiss SMT GMBH
Reinhold Walser
G02 - OPTICS
Information
Patent Application
PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC EUV PROJECTION EXPOSUR...
Publication number
20110090559
Publication date
Apr 21, 2011
Carl Zeiss SMT GMBH
Siegfried Rennon
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20110038061
Publication date
Feb 17, 2011
Carl Zeiss SMT AG
Alexander EPPLE
G02 - OPTICS