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Thomas Schmidt
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Goettingen, DE
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last 30 patents
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Patent Grant
Master-oscillator power-amplifier (MOPA) excimer or molecular fluor...
Patent number
7,245,420
Issue date
Jul 17, 2007
Lambda Physik AG
Sergei V. Govorkov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Master-oscillator power-amplifier (MOPA) excimer or molecular fluor...
Patent number
7,184,204
Issue date
Feb 27, 2007
Lambda Physik AG
Sergei V. Govorkov
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Master-oscillator power-amplifier (MOPA) excimer or molecular fluor...
Publication number
20070115535
Publication date
May 24, 2007
Sergei V. Govorkov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Excimer laser system with stable beam output
Publication number
20050271110
Publication date
Dec 8, 2005
Rainer Paetzel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Master-oscillator power-amplifier (MOPA) excimer or molecular fluor...
Publication number
20050002425
Publication date
Jan 6, 2005
Sergei V. Govorkov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Fast linear motor for wavelength variation for lithography lasers
Publication number
20040190577
Publication date
Sep 30, 2004
Hans-Stephan Albrecht
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Monitoring of spectral purity and advanced spectral characteristics...
Publication number
20040141182
Publication date
Jul 22, 2004
Thomas Schroder
G01 - MEASURING TESTING