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Thomas Schulze
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Oelsnitz/Erzgeb., DE
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last 30 patents
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Patent Grant
Parallel plate reactor for uniform thin film deposition with reduce...
Patent number
9,224,581
Issue date
Dec 29, 2015
Roth & Rau AG
Joachim Mai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
PARALLEL PLATE REACTOR FOR UNIFORM THIN FILM DEPOSITION WITH REDUCE...
Publication number
20120304933
Publication date
Dec 6, 2012
ROTH & RAU AG
Joachim Mai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...