Thomas Stammler

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination optical unit for projection lithography and hollow wav...
- Patent number 10,151,929
- Issue date Dec 11, 2018
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS
Information Patent Grant
Illumination system for microlithography
- Patent number 10,088,754
- Issue date Oct 2, 2018
- Carl Zeiss SMT GmbH
- Axel Scholz
- G02 - OPTICS
Information Patent Grant
Illumination system for microlithography
- Patent number 9,606,441
- Issue date Mar 28, 2017
- Carl Zeiss SMT GmbH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for microlithography
- Patent number 9,280,060
- Issue date Mar 8, 2016
- Carl Zeiss SMT GmbH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for microlithography
- Patent number 8,873,023
- Issue date Oct 28, 2014
- Carl Zeiss SMT GmbH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system and method for improving imaging properties thereof
- Patent number 7,605,914
- Issue date Oct 20, 2009
- Carl Zeiss SMT AG
- Thomas Stammler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for optimizing the image properties of at least two optical...
- Patent number 7,301,622
- Issue date Nov 27, 2007
- Carl Zeiss SMT AG
- Bernd Geh
- G01 - MEASURING TESTING
Information Patent Grant
Method for optimizing the image properties of at least two optical...
- Patent number 6,934,011
- Issue date Aug 23, 2005
- Carl Zeiss SMT AG
- Bernd Geh
- G01 - MEASURING TESTING
Information Patent Grant
Method for optimizing the image properties of at least two optical...
- Patent number 6,678,240
- Issue date Jan 13, 2004
- Carl Zeiss SMT AG
- Bernd Geh
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20170192361
- Publication date Jul 6, 2017
- Carl Zeiss SMT GMBH
- Axel Scholz
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY AND HOLLOW WAV...
- Publication number 20170102551
- Publication date Apr 13, 2017
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20160161858
- Publication date Jun 9, 2016
- Carl Zeiss SMT GMBH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20150022798
- Publication date Jan 22, 2015
- Carl Zeiss SMT GMBH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20120019796
- Publication date Jan 26, 2012
- Carl Zeiss SMT GMBH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL MEASUREMENT APPARATUS FOR A PROJECTION EXPOSURE SYSTEM
- Publication number 20100079738
- Publication date Apr 1, 2010
- Carl Zeiss SMT AG
- Johannes Eisenmenger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM AND METHOD FOR IMPROVING IMAGING PROPERTIES THEREOF
- Publication number 20090225308
- Publication date Sep 10, 2009
- Carl Zeiss SMT AG
- Thomas Stammler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for optimizing the image properties of at least two optical...
- Publication number 20080068599
- Publication date Mar 20, 2008
- Carl Zeiss SMT AG
- Bernd Geh
- G02 - OPTICS
Information Patent Application
Optical system and method for improving imaging properties thereof
- Publication number 20070071303
- Publication date Mar 29, 2007
- Thomas Stammler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for optimizing the image properties of at least two optical...
- Publication number 20050254042
- Publication date Nov 17, 2005
- Bernd Geh
- G02 - OPTICS
Information Patent Application
Method for optimising the image properties of at least two optical...
- Publication number 20040090617
- Publication date May 13, 2004
- Bernd Geh
- G02 - OPTICS
Information Patent Application
Method for optimizing the image properties of at least two optical...
- Publication number 20030071986
- Publication date Apr 17, 2003
- Bernd Geh
- G02 - OPTICS

Thomas Stammler

Person

Patents Grantslast 30 patents

Illumination optical unit for projection lithography and hollow wav...

Illumination system for microlithography

Illumination system for microlithography

Illumination system for microlithography

Illumination system for microlithography

Optical system and method for improving imaging properties thereof

Method for optimizing the image properties of at least two optical...

Method for optimizing the image properties of at least two optical...

Method for optimizing the image properties of at least two optical...

Patents Applicationslast 30 patents

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY AND HOLLOW WAV...

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

OPTICAL MEASUREMENT APPARATUS FOR A PROJECTION EXPOSURE SYSTEM

OPTICAL SYSTEM AND METHOD FOR IMPROVING IMAGING PROPERTIES THEREOF

Method for optimizing the image properties of at least two optical...

Optical system and method for improving imaging properties thereof

Method for optimizing the image properties of at least two optical...

Method for optimising the image properties of at least two optical...

Method for optimizing the image properties of at least two optical...