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Oberkochen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method for removing a contamination layer from an optical surface a...
Patent number
8,980,009
Issue date
Mar 17, 2015
Carl Zeiss SMT GmbH
Dirk Heinrich Ehm
B08 - CLEANING
Information
Patent Grant
Optical arrangement, in particular projection exposure apparatus fo...
Patent number
8,585,224
Issue date
Nov 19, 2013
Carl Zeiss SMT GmbH
Dirk Heinrich Ehm
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method for removing a contamination layer from an optical surface a...
Patent number
8,419,862
Issue date
Apr 16, 2013
Carl Zeiss SMT GmbH
Dirk Heinrich Ehm
B08 - CLEANING
Information
Patent Grant
Optical arrangement, in particular projection exposure apparatus fo...
Patent number
8,382,301
Issue date
Feb 26, 2013
Carl Zeiss SMT GmbH
Dirk Heinrich Ehm
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Optical arrangement and EUV lithography device with at least one he...
Patent number
7,959,310
Issue date
Jun 14, 2011
Carl Zeiss SMT GmbH
Dirk Heinrich Ehm
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Lithographic apparatus, and device manufacturing method
Patent number
7,928,412
Issue date
Apr 19, 2011
ASML Netherlands B.V.
Maarten Marinus Johannes Wilhelmus Van Herpen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for cleaning an EUV lithography device, method for measuring...
Patent number
7,911,598
Issue date
Mar 22, 2011
Carl Zeiss SMT AG
Dieter Kraus
G01 - MEASURING TESTING
Information
Patent Grant
Cleaning method, apparatus and cleaning system
Patent number
7,671,347
Issue date
Mar 2, 2010
ASML Netherlands B.V.
Dirk Heinrich Ehm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, and device manufacturing method
Patent number
7,629,594
Issue date
Dec 8, 2009
ASML Netherlands B.V.
Maarten Marinus Johannes Wilhelmus Van Herpen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR REMOVING A CONTAMINATION LAYER FROM AN OPTICAL SURFACE A...
Publication number
20130186430
Publication date
Jul 25, 2013
ASML NETHERLANDS B.V.
Dirk Heinrich Ehm
B08 - CLEANING
Information
Patent Application
OPTICAL ARRANGEMENT, IN PARTICULAR PROJECTION EXPOSURE APPARATUS FO...
Publication number
20130148200
Publication date
Jun 13, 2013
ASML NETHERLANDS B.V.
Dirk Heinrich Ehm
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method for removing a contamination layer from an optical surface a...
Publication number
20100288302
Publication date
Nov 18, 2010
Dirk Heinrich Ehm
B08 - CLEANING
Information
Patent Application
METHOD FOR CLEANING AN EUV LITHOGRAPHY DEVICE, METHOD FOR MEASURING...
Publication number
20100034349
Publication date
Feb 11, 2010
Carl Zeiss SMT AG
Dieter KRAUS
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL ARRANGEMENT, IN PARTICULAR PROJECTION EXPOSURE APPARATUS FO...
Publication number
20090231707
Publication date
Sep 17, 2009
Carl Zeiss SMT AG
Dirk Heinrich EHM
B82 - NANO-TECHNOLOGY
Information
Patent Application
Lithographic Apparatus, and Device Manufacturing Method
Publication number
20090173360
Publication date
Jul 9, 2009
ASML NETHERLANDS B.V.
Maarten Marinus Johannes Wilhelmus VAN HERPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ARRANGEMENT AND EUV LITHOGRAPHY DEVICE WITH AT LEAST ONE HE...
Publication number
20080143981
Publication date
Jun 19, 2008
Carl Zeis SMT AG
Dirk Heinrich EHM
B82 - NANO-TECHNOLOGY
Information
Patent Application
Cleaning method, apparatus and cleaning system
Publication number
20080083878
Publication date
Apr 10, 2008
ASML NETHERLANDS B.V.
Dirk Heinrich Ehm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, and device manufacturing method
Publication number
20080083885
Publication date
Apr 10, 2008
ASML NETHERLANDS B.V.
Maarten Marinus Johannes Wilhelmus Van Herpen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and method for the detection of a surface reaction, espec...
Publication number
20070143032
Publication date
Jun 21, 2007
Carl Zeiss SMT AG
Fokko Pieter Wieringa
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE