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West Borough, MA, US
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last 30 patents
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Patent Grant
Apparatus and method for electrolytically depositing copper on a se...
Patent number
6,932,892
Issue date
Aug 23, 2005
Semitool, Inc.
Linlin Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus and method for electrolytically depositing copper on a se...
Patent number
6,638,410
Issue date
Oct 28, 2003
Semitool, Inc.
Linlin Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
Apparatus and method for electrolytically depositing copper on a se...
Publication number
20040092065
Publication date
May 13, 2004
Semitool, Inc.
Linlin Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Apparatus and method for electrolytically depositing copper on a se...
Publication number
20040040857
Publication date
Mar 4, 2004
Semitool, Inc.
Lin Lin Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Apparatus and method for electrolytically depositing copper on a se...
Publication number
20040035710
Publication date
Feb 26, 2004
Semitool, Inc.
Linlin Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Apparatus and method for electrolytically depositing copper on a se...
Publication number
20040035708
Publication date
Feb 26, 2004
Semitool, Inc.
Linlin Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Apparatus and method for electrolytically depositing copper on a se...
Publication number
20030155249
Publication date
Aug 21, 2003
Semitool, Inc.
Linlin Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR