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Thomas Theiler
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Ulm, DE
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last 30 patents
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Patent Grant
Device and method for producing dielectric layers in microwave plasma
Patent number
8,716,153
Issue date
May 6, 2014
HQ-Dielectrics GmbH
Wilfried Lerch
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for the thermal treatment of disk-shaped substrates
Patent number
7,704,898
Issue date
Apr 27, 2010
Mattson Technology, Inc.
Zsolt Nenyei
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Rapid thermal processing (RTP) system with rotating substrate
Patent number
5,965,047
Issue date
Oct 12, 1999
Steag AST
Werner Blersch
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
DEVICE AND METHOD FOR PRODUCING DIELECTRIC LAYERS IN MICROWAVE PLASMA
Publication number
20110217849
Publication date
Sep 8, 2011
Wilfried Lerch
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for the Thermal Treatment of Disk-Shaped Substrates
Publication number
20080311761
Publication date
Dec 18, 2008
Zsolt Nenyei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and method for the reduction of particles in the thermal tre...
Publication number
20070098904
Publication date
May 3, 2007
Helmut Aschner
H01 - BASIC ELECTRIC ELEMENTS